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- W2038966770 abstract "Multifunctional a - diazo - β - ketoesters (DKE) 6 provide an attractive source of deep UV sensitive photoactive compounds with a broad potential for modification of their chemical, physical and lithographic properties. In combination with highly transparent resins, they offer insights into the development of a positive working deep UV sensitive two - component photoresist." @default.
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- W2038966770 date "1990-04-01" @default.
- W2038966770 modified "2023-10-03" @default.
- W2038966770 title "A novel two component positive photoresist for deep UV lithography" @default.
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- W2038966770 doi "https://doi.org/10.1016/0167-9317(90)90157-o" @default.
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