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- W2038967701 abstract "We fabricated SiGe/Si free-standing micro-objects on a silicon-on-insulator (SOI) substrate using the SiO2 sacrificial layer. SiGe/Si strained films were grown by molecular beam epitaxy on SOI substrates. The films were released from the substrate by selective etching of the SiO2 layer. The released films rolled up due to the elastic strain in the SiGe layer. Microtubes and microspirals with a diameter of about 40 μm were obtained." @default.
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- W2038967701 date "2003-08-21" @default.
- W2038967701 modified "2023-10-17" @default.
- W2038967701 title "SiGe/Si microtubes fabricated on a silicon-on-insulator substrate" @default.
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- W2038967701 doi "https://doi.org/10.1088/0022-3727/36/17/102" @default.
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