Matches in SemOpenAlex for { <https://semopenalex.org/work/W2039156683> ?p ?o ?g. }
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- W2039156683 endingPage "467" @default.
- W2039156683 startingPage "465" @default.
- W2039156683 abstract "Abstract Insulator-InSb structures are produced by plasma enhanced chemical vapour deposition of SiO2. The interface chemical composition of samples exposed to H2 plasma predeposition treatment obtained by means of Auger electron spectroscopy is compared to reference samples which have received standard chemical treatment. The plasma treatment is not effective for the removal of the natural oxide layer from InSb surface. As a result porous film has formed resulting in a wide interface region of the SiO2-InSb structures with rather complicated composition." @default.
- W2039156683 created "2016-06-24" @default.
- W2039156683 creator A5057246282 @default.
- W2039156683 creator A5068131320 @default.
- W2039156683 date "1989-03-01" @default.
- W2039156683 modified "2023-10-16" @default.
- W2039156683 title "Predeposition plasma treatment of InSb surface in pecvd SiO2-InSb Structures" @default.
- W2039156683 cites W1972432318 @default.
- W2039156683 cites W1983162810 @default.
- W2039156683 cites W2004003256 @default.
- W2039156683 cites W2018496465 @default.
- W2039156683 cites W2023340302 @default.
- W2039156683 cites W2028904614 @default.
- W2039156683 cites W2067187835 @default.
- W2039156683 cites W2074893126 @default.
- W2039156683 cites W2091161001 @default.
- W2039156683 doi "https://doi.org/10.1016/0167-577x(89)90054-2" @default.
- W2039156683 hasPublicationYear "1989" @default.
- W2039156683 type Work @default.
- W2039156683 sameAs 2039156683 @default.
- W2039156683 citedByCount "3" @default.
- W2039156683 crossrefType "journal-article" @default.
- W2039156683 hasAuthorship W2039156683A5057246282 @default.
- W2039156683 hasAuthorship W2039156683A5068131320 @default.
- W2039156683 hasConcept C121332964 @default.
- W2039156683 hasConcept C192562407 @default.
- W2039156683 hasConcept C38347018 @default.
- W2039156683 hasConcept C49040817 @default.
- W2039156683 hasConcept C57410435 @default.
- W2039156683 hasConcept C62520636 @default.
- W2039156683 hasConcept C82706917 @default.
- W2039156683 hasConceptScore W2039156683C121332964 @default.
- W2039156683 hasConceptScore W2039156683C192562407 @default.
- W2039156683 hasConceptScore W2039156683C38347018 @default.
- W2039156683 hasConceptScore W2039156683C49040817 @default.
- W2039156683 hasConceptScore W2039156683C57410435 @default.
- W2039156683 hasConceptScore W2039156683C62520636 @default.
- W2039156683 hasConceptScore W2039156683C82706917 @default.
- W2039156683 hasIssue "12" @default.
- W2039156683 hasLocation W20391566831 @default.
- W2039156683 hasOpenAccess W2039156683 @default.
- W2039156683 hasPrimaryLocation W20391566831 @default.
- W2039156683 hasRelatedWork W2002152537 @default.
- W2039156683 hasRelatedWork W2058676402 @default.
- W2039156683 hasRelatedWork W2068590759 @default.
- W2039156683 hasRelatedWork W2123610007 @default.
- W2039156683 hasRelatedWork W2329285141 @default.
- W2039156683 hasRelatedWork W2901428048 @default.
- W2039156683 hasRelatedWork W2902546961 @default.
- W2039156683 hasRelatedWork W4297186273 @default.
- W2039156683 hasRelatedWork W4313653414 @default.
- W2039156683 hasRelatedWork W4321460763 @default.
- W2039156683 hasVolume "7" @default.
- W2039156683 isParatext "false" @default.
- W2039156683 isRetracted "false" @default.
- W2039156683 magId "2039156683" @default.
- W2039156683 workType "article" @default.