FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2039235747> ?p ?o ?g. }

• W2039235747 endingPage "077001" @default.
• W2039235747 startingPage "077001" @default.
• W2039235747 abstract "A full-wafer process is presented for fast and simple fabrication of glass microfluidic chips with integrated electroplated electrodes. The process employs the permanent dry film resist (DFR) Ordyl SY300 to create microfluidic channels, followed by electroplating of silver and subsequent chlorination. The dry film resist is bonded directly to a second substrate, without intermediate gluing layers, only by applying pressure and moderate heating. The process of microfluidic channel fabrication, electroplating and wafer bonding can be completed within 1 day, thus making it one of the fastest and simplest full-wafer fabrication processes." @default.
• W2039235747 created "2016-06-24" @default.
• W2039235747 creator A5016189775 @default.
• W2039235747 creator A5043410411 @default.
• W2039235747 creator A5044520105 @default.
• W2039235747 creator A5088891418 @default.
• W2039235747 date "2009-06-23" @default.
• W2039235747 modified "2023-10-12" @default.
• W2039235747 title "A full-wafer fabrication process for glass microfluidic chips with integrated electroplated electrodes by direct bonding of dry film resist" @default.
• W2039235747 cites W1974565277 @default.
• W2039235747 cites W1977636327 @default.
• W2039235747 cites W2023639503 @default.
• W2039235747 cites W2024077714 @default.
• W2039235747 cites W2035757080 @default.
• W2039235747 cites W2047021260 @default.
• W2039235747 cites W2049704681 @default.
• W2039235747 cites W2069126105 @default.
• W2039235747 cites W2079464417 @default.
• W2039235747 cites W2095062797 @default.
• W2039235747 cites W2138380080 @default.
• W2039235747 cites W2150554911 @default.
• W2039235747 cites W2166869297 @default.
• W2039235747 doi "https://doi.org/10.1088/0960-1317/19/7/077001" @default.
• W2039235747 hasPublicationYear "2009" @default.
• W2039235747 type Work @default.
• W2039235747 sameAs 2039235747 @default.
• W2039235747 citedByCount "63" @default.
• W2039235747 countsByYear W20392357472012 @default.
• W2039235747 countsByYear W20392357472013 @default.
• W2039235747 countsByYear W20392357472014 @default.
• W2039235747 countsByYear W20392357472015 @default.
• W2039235747 countsByYear W20392357472016 @default.
• W2039235747 countsByYear W20392357472017 @default.
• W2039235747 countsByYear W20392357472018 @default.
• W2039235747 countsByYear W20392357472019 @default.
• W2039235747 countsByYear W20392357472020 @default.
• W2039235747 countsByYear W20392357472021 @default.
• W2039235747 countsByYear W20392357472022 @default.
• W2039235747 countsByYear W20392357472023 @default.
• W2039235747 crossrefType "journal-article" @default.
• W2039235747 hasAuthorship W2039235747A5016189775 @default.
• W2039235747 hasAuthorship W2039235747A5043410411 @default.
• W2039235747 hasAuthorship W2039235747A5044520105 @default.
• W2039235747 hasAuthorship W2039235747A5088891418 @default.
• W2039235747 hasConcept C126355924 @default.
• W2039235747 hasConcept C136525101 @default.
• W2039235747 hasConcept C142724271 @default.
• W2039235747 hasConcept C147789679 @default.
• W2039235747 hasConcept C160671074 @default.
• W2039235747 hasConcept C165013422 @default.
• W2039235747 hasConcept C171250308 @default.
• W2039235747 hasConcept C17525397 @default.
• W2039235747 hasConcept C185592680 @default.
• W2039235747 hasConcept C192562407 @default.
• W2039235747 hasConcept C201414436 @default.
• W2039235747 hasConcept C204787440 @default.
• W2039235747 hasConcept C2779133538 @default.
• W2039235747 hasConcept C2779227376 @default.
• W2039235747 hasConcept C51807945 @default.
• W2039235747 hasConcept C53524968 @default.
• W2039235747 hasConcept C71924100 @default.
• W2039235747 hasConcept C8673954 @default.
• W2039235747 hasConceptScore W2039235747C126355924 @default.
• W2039235747 hasConceptScore W2039235747C136525101 @default.
• W2039235747 hasConceptScore W2039235747C142724271 @default.
• W2039235747 hasConceptScore W2039235747C147789679 @default.
• W2039235747 hasConceptScore W2039235747C160671074 @default.
• W2039235747 hasConceptScore W2039235747C165013422 @default.
• W2039235747 hasConceptScore W2039235747C171250308 @default.
• W2039235747 hasConceptScore W2039235747C17525397 @default.
• W2039235747 hasConceptScore W2039235747C185592680 @default.
• W2039235747 hasConceptScore W2039235747C192562407 @default.
• W2039235747 hasConceptScore W2039235747C201414436 @default.
• W2039235747 hasConceptScore W2039235747C204787440 @default.
• W2039235747 hasConceptScore W2039235747C2779133538 @default.
• W2039235747 hasConceptScore W2039235747C2779227376 @default.
• W2039235747 hasConceptScore W2039235747C51807945 @default.
• W2039235747 hasConceptScore W2039235747C53524968 @default.
• W2039235747 hasConceptScore W2039235747C71924100 @default.
• W2039235747 hasConceptScore W2039235747C8673954 @default.
• W2039235747 hasIssue "7" @default.
• W2039235747 hasLocation W20392357471 @default.
• W2039235747 hasOpenAccess W2039235747 @default.
• W2039235747 hasPrimaryLocation W20392357471 @default.
• W2039235747 hasRelatedWork W2015444903 @default.
• W2039235747 hasRelatedWork W2029050535 @default.
• W2039235747 hasRelatedWork W2050411621 @default.
• W2039235747 hasRelatedWork W2105130406 @default.
• W2039235747 hasRelatedWork W260576591 @default.
• W2039235747 hasRelatedWork W2609709073 @default.
• W2039235747 hasRelatedWork W2746858012 @default.
• W2039235747 hasRelatedWork W3023547681 @default.
• W2039235747 hasRelatedWork W3190206349 @default.
• W2039235747 hasRelatedWork W4211053177 @default.
• W2039235747 hasVolume "19" @default.
• W2039235747 isParatext "false" @default.
• W2039235747 isRetracted "false" @default.
• W2039235747 magId "2039235747" @default.

• next