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- W2039274312 abstract "This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited thermal sensors for infrared imaging and biochemical sensing applications. An integrated quartz sensor array using CMOS-compatible micromachining techniques has been designed and fabricated. 241 MHz micromachined resonators from Y-cut quartz crystal cuts were fabricated with a temperature sensitivity of 22.162 kHz/°C. Infrared measurements on the resonator pixel resulted in a noise equivalent power (NEP) of 3.90 nW/Hz <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>1/2</sup> , detectivity D* of 9.17 ×10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>7</sup> cmHz <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>1/2</sup> /W, and noise equivalent temperature difference (NETD) in the 8-12 μm wavelength region of 4 mK and a response time of <;30 Hz. In a unique new application a remotely coupled thermal sensor configuration was used to monitor biochemical reactions in real time." @default.
- W2039274312 created "2016-06-24" @default.
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- W2039274312 date "2010-11-01" @default.
- W2039274312 modified "2023-09-27" @default.
- W2039274312 title "Micromachined quartz resonator-based high performance thermal sensors" @default.
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- W2039274312 doi "https://doi.org/10.1109/icsens.2010.5690612" @default.
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