Matches in SemOpenAlex for { <https://semopenalex.org/work/W2039299931> ?p ?o ?g. }
- W2039299931 endingPage "024011" @default.
- W2039299931 startingPage "024011" @default.
- W2039299931 abstract "The plasma microprocess has developed in cooperation with the miniaturization and high integration of devices in semiconductor manufacturing into a top-down nanoprocess over the last decade. In this paper we present or partly review our series of investigations on a two-frequency capacitively coupled radio frequency plasma (2f-CCP) for etching, sustained by a very-high-frequency source and biased by a low-frequency source in a collisional region. In particular, the velocity distributions of electrons in a bulk plasma, and ions incident on a structured wafer surface are discussed. The plasma surface process, being competitive with etching, deposition, and sometimes charging, has two critical phenomena in etching: plasma molding at a larger structure and microloading at a smaller size. It will be demonstrated that the modeling will be capable of predicting or designing a low-pressure plasma process for etching, after the modeling of the nonequilibrium plasma structure is smoothly coupled with the modeling of the feature profile evolution. Examples of the feature profile evolution of Si, SiO2 and organic low-k material by using a 2f-CCP in each of the feed gases are shown." @default.
- W2039299931 created "2016-06-24" @default.
- W2039299931 creator A5017652186 @default.
- W2039299931 creator A5051187319 @default.
- W2039299931 date "2011-04-01" @default.
- W2039299931 modified "2023-09-26" @default.
- W2039299931 title "Low-pressure nonequilibrium plasma for a top-down nanoprocess" @default.
- W2039299931 cites W1971828193 @default.
- W2039299931 cites W1971991820 @default.
- W2039299931 cites W1972925367 @default.
- W2039299931 cites W1979105750 @default.
- W2039299931 cites W1980764449 @default.
- W2039299931 cites W1984846961 @default.
- W2039299931 cites W1985840975 @default.
- W2039299931 cites W1987992409 @default.
- W2039299931 cites W1991113069 @default.
- W2039299931 cites W1999599779 @default.
- W2039299931 cites W2000924496 @default.
- W2039299931 cites W2002805356 @default.
- W2039299931 cites W2004315519 @default.
- W2039299931 cites W2010741193 @default.
- W2039299931 cites W2010875737 @default.
- W2039299931 cites W2012198682 @default.
- W2039299931 cites W2015707502 @default.
- W2039299931 cites W2017975908 @default.
- W2039299931 cites W2019423323 @default.
- W2039299931 cites W2021974864 @default.
- W2039299931 cites W2023130906 @default.
- W2039299931 cites W2028496930 @default.
- W2039299931 cites W2029315837 @default.
- W2039299931 cites W2030262431 @default.
- W2039299931 cites W2030343633 @default.
- W2039299931 cites W2031201399 @default.
- W2039299931 cites W2031688765 @default.
- W2039299931 cites W2032247708 @default.
- W2039299931 cites W2032477939 @default.
- W2039299931 cites W2038900562 @default.
- W2039299931 cites W2041009400 @default.
- W2039299931 cites W2048131010 @default.
- W2039299931 cites W2051188571 @default.
- W2039299931 cites W2052559407 @default.
- W2039299931 cites W2053778315 @default.
- W2039299931 cites W2075494014 @default.
- W2039299931 cites W2079573315 @default.
- W2039299931 cites W2082497137 @default.
- W2039299931 cites W2084226128 @default.
- W2039299931 cites W2086991530 @default.
- W2039299931 cites W2089214316 @default.
- W2039299931 cites W2106976609 @default.
- W2039299931 cites W2107596116 @default.
- W2039299931 cites W2110550589 @default.
- W2039299931 cites W2133943082 @default.
- W2039299931 cites W2150109955 @default.
- W2039299931 cites W2157188779 @default.
- W2039299931 cites W2160071652 @default.
- W2039299931 cites W22342028 @default.
- W2039299931 cites W2493880907 @default.
- W2039299931 cites W4246994895 @default.
- W2039299931 cites W632839044 @default.
- W2039299931 doi "https://doi.org/10.1088/0963-0252/20/2/024011" @default.
- W2039299931 hasPublicationYear "2011" @default.
- W2039299931 type Work @default.
- W2039299931 sameAs 2039299931 @default.
- W2039299931 citedByCount "1" @default.
- W2039299931 crossrefType "journal-article" @default.
- W2039299931 hasAuthorship W2039299931A5017652186 @default.
- W2039299931 hasAuthorship W2039299931A5051187319 @default.
- W2039299931 hasConcept C121332964 @default.
- W2039299931 hasConcept C121864883 @default.
- W2039299931 hasConcept C185544564 @default.
- W2039299931 hasConcept C192562407 @default.
- W2039299931 hasConcept C74859849 @default.
- W2039299931 hasConcept C82706917 @default.
- W2039299931 hasConcept C97355855 @default.
- W2039299931 hasConceptScore W2039299931C121332964 @default.
- W2039299931 hasConceptScore W2039299931C121864883 @default.
- W2039299931 hasConceptScore W2039299931C185544564 @default.
- W2039299931 hasConceptScore W2039299931C192562407 @default.
- W2039299931 hasConceptScore W2039299931C74859849 @default.
- W2039299931 hasConceptScore W2039299931C82706917 @default.
- W2039299931 hasConceptScore W2039299931C97355855 @default.
- W2039299931 hasIssue "2" @default.
- W2039299931 hasLocation W20392999311 @default.
- W2039299931 hasOpenAccess W2039299931 @default.
- W2039299931 hasPrimaryLocation W20392999311 @default.
- W2039299931 hasRelatedWork W1982498349 @default.
- W2039299931 hasRelatedWork W1992734408 @default.
- W2039299931 hasRelatedWork W2046459879 @default.
- W2039299931 hasRelatedWork W2089373704 @default.
- W2039299931 hasRelatedWork W2099788178 @default.
- W2039299931 hasRelatedWork W2181638128 @default.
- W2039299931 hasRelatedWork W2606430476 @default.
- W2039299931 hasRelatedWork W2742811867 @default.
- W2039299931 hasRelatedWork W2951079783 @default.
- W2039299931 hasRelatedWork W2082188198 @default.
- W2039299931 hasVolume "20" @default.
- W2039299931 isParatext "false" @default.
- W2039299931 isRetracted "false" @default.