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- W2039368045 endingPage "G497" @default.
- W2039368045 startingPage "G497" @default.
- W2039368045 abstract "We have investigated the effects of anodic bonding on silicon dioxide by measuring metal oxide semiconductor capacitors situated in Pyrex cavities. We used two different cavity depths, giving 1 or 200 μm vertical distance between the gate electrode and the Pyrex. After bonding, we found that the flatband voltage of the capacitors situated in 1 μm deep cavities had shifted toward more negative values. The shift corresponded to to increase in oxide charge density. The capacitors situated in 200 μm deep cavities showed a slight shift in the opposite direction, which we attribute to thermal annealing of oxide fixed charge. The values of the flatband voltages remained stable after nine months of storage. In addition, we observed that the current between the gate and the substrate contact had increased after bonding. The increase was by a factor between 20 and 150, depending both on cavity depth and gate geometry. The current in the capacitors with 200 μm vertical distance to the Pyrex had returned to the initial level after nine months of storage. The capacitors with 1 μm distance to the Pyrex still had enhanced currents. Some explanations for our observations are suggested. © 2002 The Electrochemical Society. All rights reserved." @default.
- W2039368045 created "2016-06-24" @default.
- W2039368045 creator A5001277863 @default.
- W2039368045 creator A5031706655 @default.
- W2039368045 creator A5072732422 @default.
- W2039368045 creator A5086246639 @default.
- W2039368045 creator A5087435159 @default.
- W2039368045 date "2002-01-01" @default.
- W2039368045 modified "2023-09-30" @default.
- W2039368045 title "Electrical Effects of Anodic Bonding on Silicon Dioxide Situated in Pyrex Cavities" @default.
- W2039368045 cites W1490932842 @default.
- W2039368045 cites W1927350671 @default.
- W2039368045 cites W1972949192 @default.
- W2039368045 cites W1985592492 @default.
- W2039368045 cites W1986620377 @default.
- W2039368045 cites W2022981129 @default.
- W2039368045 cites W2029644624 @default.
- W2039368045 cites W2090923782 @default.
- W2039368045 cites W2139747843 @default.
- W2039368045 doi "https://doi.org/10.1149/1.1492289" @default.
- W2039368045 hasPublicationYear "2002" @default.
- W2039368045 type Work @default.
- W2039368045 sameAs 2039368045 @default.
- W2039368045 citedByCount "5" @default.
- W2039368045 countsByYear W20393680452015 @default.
- W2039368045 countsByYear W20393680452020 @default.
- W2039368045 crossrefType "journal-article" @default.
- W2039368045 hasAuthorship W2039368045A5001277863 @default.
- W2039368045 hasAuthorship W2039368045A5031706655 @default.
- W2039368045 hasAuthorship W2039368045A5072732422 @default.
- W2039368045 hasAuthorship W2039368045A5086246639 @default.
- W2039368045 hasAuthorship W2039368045A5087435159 @default.
- W2039368045 hasConcept C113196181 @default.
- W2039368045 hasConcept C119599485 @default.
- W2039368045 hasConcept C127413603 @default.
- W2039368045 hasConcept C147789679 @default.
- W2039368045 hasConcept C159985019 @default.
- W2039368045 hasConcept C165801399 @default.
- W2039368045 hasConcept C17525397 @default.
- W2039368045 hasConcept C185592680 @default.
- W2039368045 hasConcept C191897082 @default.
- W2039368045 hasConcept C192562407 @default.
- W2039368045 hasConcept C201414436 @default.
- W2039368045 hasConcept C2779089622 @default.
- W2039368045 hasConcept C2779851234 @default.
- W2039368045 hasConcept C43617362 @default.
- W2039368045 hasConcept C49040817 @default.
- W2039368045 hasConcept C52192207 @default.
- W2039368045 hasConcept C544956773 @default.
- W2039368045 hasConcept C89395315 @default.
- W2039368045 hasConceptScore W2039368045C113196181 @default.
- W2039368045 hasConceptScore W2039368045C119599485 @default.
- W2039368045 hasConceptScore W2039368045C127413603 @default.
- W2039368045 hasConceptScore W2039368045C147789679 @default.
- W2039368045 hasConceptScore W2039368045C159985019 @default.
- W2039368045 hasConceptScore W2039368045C165801399 @default.
- W2039368045 hasConceptScore W2039368045C17525397 @default.
- W2039368045 hasConceptScore W2039368045C185592680 @default.
- W2039368045 hasConceptScore W2039368045C191897082 @default.
- W2039368045 hasConceptScore W2039368045C192562407 @default.
- W2039368045 hasConceptScore W2039368045C201414436 @default.
- W2039368045 hasConceptScore W2039368045C2779089622 @default.
- W2039368045 hasConceptScore W2039368045C2779851234 @default.
- W2039368045 hasConceptScore W2039368045C43617362 @default.
- W2039368045 hasConceptScore W2039368045C49040817 @default.
- W2039368045 hasConceptScore W2039368045C52192207 @default.
- W2039368045 hasConceptScore W2039368045C544956773 @default.
- W2039368045 hasConceptScore W2039368045C89395315 @default.
- W2039368045 hasIssue "8" @default.
- W2039368045 hasLocation W20393680451 @default.
- W2039368045 hasOpenAccess W2039368045 @default.
- W2039368045 hasPrimaryLocation W20393680451 @default.
- W2039368045 hasRelatedWork W1931108031 @default.
- W2039368045 hasRelatedWork W1979621585 @default.
- W2039368045 hasRelatedWork W1990666957 @default.
- W2039368045 hasRelatedWork W2055211262 @default.
- W2039368045 hasRelatedWork W2071900960 @default.
- W2039368045 hasRelatedWork W2340009885 @default.
- W2039368045 hasRelatedWork W2899084033 @default.
- W2039368045 hasRelatedWork W3045614473 @default.
- W2039368045 hasRelatedWork W3113300312 @default.
- W2039368045 hasRelatedWork W4242240802 @default.
- W2039368045 hasVolume "149" @default.
- W2039368045 isParatext "false" @default.
- W2039368045 isRetracted "false" @default.
- W2039368045 magId "2039368045" @default.
- W2039368045 workType "article" @default.