Matches in SemOpenAlex for { <https://semopenalex.org/work/W2039392344> ?p ?o ?g. }
- W2039392344 endingPage "922" @default.
- W2039392344 startingPage "918" @default.
- W2039392344 abstract "Abstract Plasma Based Ion Implantation and Deposition (PBIID) is characterized by a complex interaction of a supersonic plasma flux, a plasma sheath expanding and receding on a timescale of microseconds and a substrate which can be of an arbitrary complex shape. It is shown that ions impinging on the substrate in the wake region consist of two groups with strongly differing incidence angles. At the same time, localized ion focusing is observed only for very long pulses of 50 µs and intermediate voltages of 2.5 – 3.5 kV, independent of the cathode material – Ti or Al – and the Ar background pressure. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
- W2039392344 created "2016-06-24" @default.
- W2039392344 creator A5039336118 @default.
- W2039392344 creator A5045015959 @default.
- W2039392344 creator A5062557210 @default.
- W2039392344 creator A5083976952 @default.
- W2039392344 date "2008-04-01" @default.
- W2039392344 modified "2023-10-16" @default.
- W2039392344 title "Highly localized ion focusing effects in PBIID" @default.
- W2039392344 cites W1963728900 @default.
- W2039392344 cites W1981205971 @default.
- W2039392344 cites W1985149431 @default.
- W2039392344 cites W1992807940 @default.
- W2039392344 cites W2012779175 @default.
- W2039392344 cites W2012931921 @default.
- W2039392344 cites W2031195655 @default.
- W2039392344 cites W2031918282 @default.
- W2039392344 cites W2032808761 @default.
- W2039392344 cites W2040179900 @default.
- W2039392344 cites W2055699752 @default.
- W2039392344 cites W2057125385 @default.
- W2039392344 cites W2062782590 @default.
- W2039392344 cites W2067408449 @default.
- W2039392344 cites W2067579577 @default.
- W2039392344 cites W2068638530 @default.
- W2039392344 cites W2073539035 @default.
- W2039392344 cites W2077617194 @default.
- W2039392344 cites W2079891847 @default.
- W2039392344 cites W2089936013 @default.
- W2039392344 cites W2091833952 @default.
- W2039392344 cites W2117721657 @default.
- W2039392344 cites W2131099000 @default.
- W2039392344 doi "https://doi.org/10.1002/pssc.200778336" @default.
- W2039392344 hasPublicationYear "2008" @default.
- W2039392344 type Work @default.
- W2039392344 sameAs 2039392344 @default.
- W2039392344 citedByCount "0" @default.
- W2039392344 crossrefType "journal-article" @default.
- W2039392344 hasAuthorship W2039392344A5039336118 @default.
- W2039392344 hasAuthorship W2039392344A5045015959 @default.
- W2039392344 hasAuthorship W2039392344A5062557210 @default.
- W2039392344 hasAuthorship W2039392344A5083976952 @default.
- W2039392344 hasConcept C111368507 @default.
- W2039392344 hasConcept C120665830 @default.
- W2039392344 hasConcept C121332964 @default.
- W2039392344 hasConcept C127313418 @default.
- W2039392344 hasConcept C145148216 @default.
- W2039392344 hasConcept C147789679 @default.
- W2039392344 hasConcept C151730666 @default.
- W2039392344 hasConcept C178790620 @default.
- W2039392344 hasConcept C184779094 @default.
- W2039392344 hasConcept C185592680 @default.
- W2039392344 hasConcept C191897082 @default.
- W2039392344 hasConcept C192562407 @default.
- W2039392344 hasConcept C205991772 @default.
- W2039392344 hasConcept C2777289219 @default.
- W2039392344 hasConcept C2816523 @default.
- W2039392344 hasConcept C34742353 @default.
- W2039392344 hasConcept C49110097 @default.
- W2039392344 hasConcept C57879066 @default.
- W2039392344 hasConcept C62520636 @default.
- W2039392344 hasConcept C64297162 @default.
- W2039392344 hasConcept C68709404 @default.
- W2039392344 hasConcept C82706917 @default.
- W2039392344 hasConceptScore W2039392344C111368507 @default.
- W2039392344 hasConceptScore W2039392344C120665830 @default.
- W2039392344 hasConceptScore W2039392344C121332964 @default.
- W2039392344 hasConceptScore W2039392344C127313418 @default.
- W2039392344 hasConceptScore W2039392344C145148216 @default.
- W2039392344 hasConceptScore W2039392344C147789679 @default.
- W2039392344 hasConceptScore W2039392344C151730666 @default.
- W2039392344 hasConceptScore W2039392344C178790620 @default.
- W2039392344 hasConceptScore W2039392344C184779094 @default.
- W2039392344 hasConceptScore W2039392344C185592680 @default.
- W2039392344 hasConceptScore W2039392344C191897082 @default.
- W2039392344 hasConceptScore W2039392344C192562407 @default.
- W2039392344 hasConceptScore W2039392344C205991772 @default.
- W2039392344 hasConceptScore W2039392344C2777289219 @default.
- W2039392344 hasConceptScore W2039392344C2816523 @default.
- W2039392344 hasConceptScore W2039392344C34742353 @default.
- W2039392344 hasConceptScore W2039392344C49110097 @default.
- W2039392344 hasConceptScore W2039392344C57879066 @default.
- W2039392344 hasConceptScore W2039392344C62520636 @default.
- W2039392344 hasConceptScore W2039392344C64297162 @default.
- W2039392344 hasConceptScore W2039392344C68709404 @default.
- W2039392344 hasConceptScore W2039392344C82706917 @default.
- W2039392344 hasIssue "4" @default.
- W2039392344 hasLocation W20393923441 @default.
- W2039392344 hasOpenAccess W2039392344 @default.
- W2039392344 hasPrimaryLocation W20393923441 @default.
- W2039392344 hasRelatedWork W1617534506 @default.
- W2039392344 hasRelatedWork W1981954100 @default.
- W2039392344 hasRelatedWork W2075988464 @default.
- W2039392344 hasRelatedWork W2091949762 @default.
- W2039392344 hasRelatedWork W2144642093 @default.
- W2039392344 hasRelatedWork W3040943442 @default.
- W2039392344 hasRelatedWork W3186290646 @default.
- W2039392344 hasRelatedWork W4362663149 @default.