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- W2039403535 endingPage "012021" @default.
- W2039403535 startingPage "012021" @default.
- W2039403535 abstract "Nanoimprint lithography (NIL) is a promising method for fabricating nanoscale patterns, because of its low cost and process simplicity. There is a growing demand for three-dimensional (3D) nanoimprint molds for various optical devices and dual-damascene processes. We examined the fabrication of a 3D line-and-space (L&S) pattern as a nanoimprint mold by low-acceleration-voltage (<5 kV) electron-beam (EB) lithography. Normally, it is difficult to obtain a fine L&S pattern by using a low acceleration voltage because of the large proximity effect caused by forward scattering of electrons. We therefore used an inorganic resist, which has higher contrast than an organic resist because of the smaller size of its molecules. As a result, a fine L&S patterned 3D nanoimprint mold with a line-width of less than 100 nm was fabricated by means of low-acceleration voltage EB lithography using an optimized EB dose and an optimized L&S pattern with an inorganic resist." @default.
- W2039403535 created "2016-06-24" @default.
- W2039403535 creator A5008408012 @default.
- W2039403535 creator A5091158809 @default.
- W2039403535 date "2008-03-01" @default.
- W2039403535 modified "2023-09-26" @default.
- W2039403535 title "Fabrication of a three-dimensional nanoimprint mold by using electron beam lithography with consideration of the proximity effect" @default.
- W2039403535 cites W1990260630 @default.
- W2039403535 cites W2001798417 @default.
- W2039403535 cites W2017759576 @default.
- W2039403535 cites W2054597404 @default.
- W2039403535 cites W2085022659 @default.
- W2039403535 doi "https://doi.org/10.1088/1742-6596/106/1/012021" @default.
- W2039403535 hasPublicationYear "2008" @default.
- W2039403535 type Work @default.
- W2039403535 sameAs 2039403535 @default.
- W2039403535 citedByCount "6" @default.
- W2039403535 countsByYear W20394035352013 @default.
- W2039403535 countsByYear W20394035352014 @default.
- W2039403535 countsByYear W20394035352016 @default.
- W2039403535 countsByYear W20394035352018 @default.
- W2039403535 countsByYear W20394035352019 @default.
- W2039403535 crossrefType "journal-article" @default.
- W2039403535 hasAuthorship W2039403535A5008408012 @default.
- W2039403535 hasAuthorship W2039403535A5091158809 @default.
- W2039403535 hasBestOaLocation W20394035351 @default.
- W2039403535 hasConcept C117896860 @default.
- W2039403535 hasConcept C121332964 @default.
- W2039403535 hasConcept C122802935 @default.
- W2039403535 hasConcept C136525101 @default.
- W2039403535 hasConcept C142724271 @default.
- W2039403535 hasConcept C147120987 @default.
- W2039403535 hasConcept C159985019 @default.
- W2039403535 hasConcept C162117346 @default.
- W2039403535 hasConcept C163581340 @default.
- W2039403535 hasConcept C171250308 @default.
- W2039403535 hasConcept C192562407 @default.
- W2039403535 hasConcept C200274948 @default.
- W2039403535 hasConcept C204223013 @default.
- W2039403535 hasConcept C204787440 @default.
- W2039403535 hasConcept C2777046567 @default.
- W2039403535 hasConcept C2779227376 @default.
- W2039403535 hasConcept C2780566776 @default.
- W2039403535 hasConcept C41794268 @default.
- W2039403535 hasConcept C49040817 @default.
- W2039403535 hasConcept C53524968 @default.
- W2039403535 hasConcept C62520636 @default.
- W2039403535 hasConcept C70520399 @default.
- W2039403535 hasConcept C71924100 @default.
- W2039403535 hasConcept C74650414 @default.
- W2039403535 hasConcept C95312477 @default.
- W2039403535 hasConceptScore W2039403535C117896860 @default.
- W2039403535 hasConceptScore W2039403535C121332964 @default.
- W2039403535 hasConceptScore W2039403535C122802935 @default.
- W2039403535 hasConceptScore W2039403535C136525101 @default.
- W2039403535 hasConceptScore W2039403535C142724271 @default.
- W2039403535 hasConceptScore W2039403535C147120987 @default.
- W2039403535 hasConceptScore W2039403535C159985019 @default.
- W2039403535 hasConceptScore W2039403535C162117346 @default.
- W2039403535 hasConceptScore W2039403535C163581340 @default.
- W2039403535 hasConceptScore W2039403535C171250308 @default.
- W2039403535 hasConceptScore W2039403535C192562407 @default.
- W2039403535 hasConceptScore W2039403535C200274948 @default.
- W2039403535 hasConceptScore W2039403535C204223013 @default.
- W2039403535 hasConceptScore W2039403535C204787440 @default.
- W2039403535 hasConceptScore W2039403535C2777046567 @default.
- W2039403535 hasConceptScore W2039403535C2779227376 @default.
- W2039403535 hasConceptScore W2039403535C2780566776 @default.
- W2039403535 hasConceptScore W2039403535C41794268 @default.
- W2039403535 hasConceptScore W2039403535C49040817 @default.
- W2039403535 hasConceptScore W2039403535C53524968 @default.
- W2039403535 hasConceptScore W2039403535C62520636 @default.
- W2039403535 hasConceptScore W2039403535C70520399 @default.
- W2039403535 hasConceptScore W2039403535C71924100 @default.
- W2039403535 hasConceptScore W2039403535C74650414 @default.
- W2039403535 hasConceptScore W2039403535C95312477 @default.
- W2039403535 hasLocation W20394035351 @default.
- W2039403535 hasOpenAccess W2039403535 @default.
- W2039403535 hasPrimaryLocation W20394035351 @default.
- W2039403535 hasRelatedWork W114158331 @default.
- W2039403535 hasRelatedWork W2003241729 @default.
- W2039403535 hasRelatedWork W2009658857 @default.
- W2039403535 hasRelatedWork W2021670711 @default.
- W2039403535 hasRelatedWork W2039403535 @default.
- W2039403535 hasRelatedWork W2055565127 @default.
- W2039403535 hasRelatedWork W2089490419 @default.
- W2039403535 hasRelatedWork W2538665131 @default.
- W2039403535 hasRelatedWork W2906528141 @default.
- W2039403535 hasRelatedWork W573585812 @default.
- W2039403535 hasVolume "106" @default.
- W2039403535 isParatext "false" @default.
- W2039403535 isRetracted "false" @default.
- W2039403535 magId "2039403535" @default.
- W2039403535 workType "article" @default.