Matches in SemOpenAlex for { <https://semopenalex.org/work/W2039406684> ?p ?o ?g. }
- W2039406684 endingPage "085022" @default.
- W2039406684 startingPage "085022" @default.
- W2039406684 abstract "This paper reports on the piezoelectric-microelectromechanical system micro-fabrication process and the behavior of piezoelectric stacks actuated silicon cantilevers. All oxide layers in the piezoelectric stacks, such as buffer-layer/bottom-electrode/film/top-electrode: YSZ/SrRuO3/Pb(Zr,Ti)3/SrRuO3, were grown epitaxially on the Si template of silicon-on-insulator substrates by pulsed laser deposition. By using an analytical model and finite element simulation, the initial bending of the cantilevers was calculated. These theoretical analyses are in good agreement with the experimental results which were determined using a white light interferometer. The dependences of the cantilever displacement, resonance frequency and quality factor on the cantilever geometry have been investigated using a laser-Doppler vibrometer. The tip displacement ranged from 0.03 to 0.42 µm V−1, whereas the resonance frequency and quality factor values changed from 1010 to 18.6 kHz and 614 to 174, respectively, for the cantilevers with lengths in the range of 100–800 µm. Furthermore, the effect of the conductive oxide electrodes on the stability of the piezoelectric displacement of the cantilevers has been studied." @default.
- W2039406684 created "2016-06-24" @default.
- W2039406684 creator A5005441379 @default.
- W2039406684 creator A5010580183 @default.
- W2039406684 creator A5043830254 @default.
- W2039406684 creator A5053710149 @default.
- W2039406684 creator A5068067980 @default.
- W2039406684 creator A5068678957 @default.
- W2039406684 creator A5077896418 @default.
- W2039406684 creator A5083086580 @default.
- W2039406684 creator A5083312349 @default.
- W2039406684 date "2010-07-12" @default.
- W2039406684 modified "2023-09-29" @default.
- W2039406684 title "Characterization of epitaxial Pb(Zr,Ti)O<sub>3</sub>thin films deposited by pulsed laser deposition on silicon cantilevers" @default.
- W2039406684 cites W1524489453 @default.
- W2039406684 cites W1539231539 @default.
- W2039406684 cites W1562696648 @default.
- W2039406684 cites W1747309062 @default.
- W2039406684 cites W1964250532 @default.
- W2039406684 cites W1969173548 @default.
- W2039406684 cites W1972900616 @default.
- W2039406684 cites W1978276800 @default.
- W2039406684 cites W1979649446 @default.
- W2039406684 cites W1985292908 @default.
- W2039406684 cites W1986394536 @default.
- W2039406684 cites W1989875015 @default.
- W2039406684 cites W1998734562 @default.
- W2039406684 cites W1999184785 @default.
- W2039406684 cites W1999552064 @default.
- W2039406684 cites W2005026311 @default.
- W2039406684 cites W2009398380 @default.
- W2039406684 cites W2011047182 @default.
- W2039406684 cites W2013823218 @default.
- W2039406684 cites W2021981834 @default.
- W2039406684 cites W2023325937 @default.
- W2039406684 cites W2025216558 @default.
- W2039406684 cites W2025905384 @default.
- W2039406684 cites W2028903835 @default.
- W2039406684 cites W2029383242 @default.
- W2039406684 cites W2030693415 @default.
- W2039406684 cites W2044542369 @default.
- W2039406684 cites W2049029018 @default.
- W2039406684 cites W2050238854 @default.
- W2039406684 cites W2050778709 @default.
- W2039406684 cites W2051230121 @default.
- W2039406684 cites W2054367981 @default.
- W2039406684 cites W2057781165 @default.
- W2039406684 cites W2058217698 @default.
- W2039406684 cites W2070028799 @default.
- W2039406684 cites W2070122354 @default.
- W2039406684 cites W2070726846 @default.
- W2039406684 cites W2071256257 @default.
- W2039406684 cites W2071713003 @default.
- W2039406684 cites W2072079557 @default.
- W2039406684 cites W2073451148 @default.
- W2039406684 cites W2078443894 @default.
- W2039406684 cites W2079393022 @default.
- W2039406684 cites W2085253914 @default.
- W2039406684 cites W2088039154 @default.
- W2039406684 cites W2090264307 @default.
- W2039406684 cites W2092488986 @default.
- W2039406684 cites W2094278316 @default.
- W2039406684 cites W2110391438 @default.
- W2039406684 cites W2116241686 @default.
- W2039406684 cites W2123580065 @default.
- W2039406684 cites W2158896500 @default.
- W2039406684 cites W4230871066 @default.
- W2039406684 doi "https://doi.org/10.1088/0960-1317/20/8/085022" @default.
- W2039406684 hasPublicationYear "2010" @default.
- W2039406684 type Work @default.
- W2039406684 sameAs 2039406684 @default.
- W2039406684 citedByCount "38" @default.
- W2039406684 countsByYear W20394066842012 @default.
- W2039406684 countsByYear W20394066842013 @default.
- W2039406684 countsByYear W20394066842014 @default.
- W2039406684 countsByYear W20394066842015 @default.
- W2039406684 countsByYear W20394066842016 @default.
- W2039406684 countsByYear W20394066842017 @default.
- W2039406684 countsByYear W20394066842018 @default.
- W2039406684 countsByYear W20394066842019 @default.
- W2039406684 countsByYear W20394066842020 @default.
- W2039406684 countsByYear W20394066842021 @default.
- W2039406684 countsByYear W20394066842022 @default.
- W2039406684 crossrefType "journal-article" @default.
- W2039406684 hasAuthorship W2039406684A5005441379 @default.
- W2039406684 hasAuthorship W2039406684A5010580183 @default.
- W2039406684 hasAuthorship W2039406684A5043830254 @default.
- W2039406684 hasAuthorship W2039406684A5053710149 @default.
- W2039406684 hasAuthorship W2039406684A5068067980 @default.
- W2039406684 hasAuthorship W2039406684A5068678957 @default.
- W2039406684 hasAuthorship W2039406684A5077896418 @default.
- W2039406684 hasAuthorship W2039406684A5083086580 @default.
- W2039406684 hasAuthorship W2039406684A5083312349 @default.
- W2039406684 hasConcept C110738630 @default.
- W2039406684 hasConcept C120665830 @default.
- W2039406684 hasConcept C121332964 @default.
- W2039406684 hasConcept C141354745 @default.
- W2039406684 hasConcept C151730666 @default.