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• W2039540131 abstract "The morphology of ultra-thin (0.6–2 nm) oxides prepared by chemical ozone-based process and rapid thermal oxidation (RTO) is studied by scanning tunneling microscopy. With a statistical analysis of the height distribution we compare the different methods used to prepare the surfaces. A roughness anisotropy is observed for the thinner oxides samples. An atomically flat surface with a thin conformal oxide is obtained by annealing the sample at temperatures >1100 °C under an hydrogen flux before RTO. In this case, the oxide morphology may be correlated to the crystalline structure underneath." @default.
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• W2039540131 date "2003-07-01" @default.
• W2039540131 modified "2023-09-24" @default.
• W2039540131 title "STM study of ultra-thin (<2 nm) silicon oxide" @default.
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• W2039540131 doi "https://doi.org/10.1016/s0022-3093(03)00198-4" @default.
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