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- W2039566261 endingPage "903" @default.
- W2039566261 startingPage "899" @default.
- W2039566261 abstract "Eutectic bonding in semiconductor fabrication requires a large degree of control over the stoichiometry and precision film thickness of the bonding materials. To reduce the migration of the bonding layers, diffusion barriers are typically utilized. Here, we demonstrate that a widely utilized diffusion barrier, Pt, does not prevent migration of Si in Si/Au eutectic bonding. We observe that this barrier breaks down at approximately 375 <formula formulatype=inline xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex Notation=TeX>$^{circ}{rm C}$</tex></formula> , above the Au–Si eutectic temperature (363 <formula formulatype=inline xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex Notation=TeX>$^{circ}{rm C}$</tex></formula> ), and encourages consumption of the silicon substrate leading to uncontrolled stoichiometry variations and creation of microvoids. This failure results in reductions of bond strength and hermeticity. As an alternative, silicon dioxide is observed to prevent the silicon diffusion and subsequent substrate loss." @default.
- W2039566261 created "2016-06-24" @default.
- W2039566261 creator A5033709012 @default.
- W2039566261 creator A5068140427 @default.
- W2039566261 date "2013-06-01" @default.
- W2039566261 modified "2023-09-26" @default.
- W2039566261 title "Platinum Diffusion Barrier Breakdown in a-Si/Au Eutectic Wafer Bonding" @default.
- W2039566261 cites W2017814565 @default.
- W2039566261 cites W2020746798 @default.
- W2039566261 cites W2027456444 @default.
- W2039566261 cites W2033730090 @default.
- W2039566261 cites W2050152244 @default.
- W2039566261 cites W2056828898 @default.
- W2039566261 cites W2070703248 @default.
- W2039566261 cites W2070871419 @default.
- W2039566261 cites W2082806161 @default.
- W2039566261 cites W2096163576 @default.
- W2039566261 cites W2000517130 @default.
- W2039566261 doi "https://doi.org/10.1109/tcpmt.2013.2239363" @default.
- W2039566261 hasPublicationYear "2013" @default.
- W2039566261 type Work @default.
- W2039566261 sameAs 2039566261 @default.
- W2039566261 citedByCount "6" @default.
- W2039566261 countsByYear W20395662612012 @default.
- W2039566261 countsByYear W20395662612014 @default.
- W2039566261 countsByYear W20395662612015 @default.
- W2039566261 countsByYear W20395662612016 @default.
- W2039566261 countsByYear W20395662612017 @default.
- W2039566261 crossrefType "journal-article" @default.
- W2039566261 hasAuthorship W2039566261A5033709012 @default.
- W2039566261 hasAuthorship W2039566261A5068140427 @default.
- W2039566261 hasConcept C111368507 @default.
- W2039566261 hasConcept C121332964 @default.
- W2039566261 hasConcept C127313418 @default.
- W2039566261 hasConcept C144082473 @default.
- W2039566261 hasConcept C147789679 @default.
- W2039566261 hasConcept C160671074 @default.
- W2039566261 hasConcept C171250308 @default.
- W2039566261 hasConcept C18168003 @default.
- W2039566261 hasConcept C185592680 @default.
- W2039566261 hasConcept C191897082 @default.
- W2039566261 hasConcept C192562407 @default.
- W2039566261 hasConcept C2777289219 @default.
- W2039566261 hasConcept C2779133538 @default.
- W2039566261 hasConcept C37487178 @default.
- W2039566261 hasConcept C544956773 @default.
- W2039566261 hasConcept C69357855 @default.
- W2039566261 hasConcept C87976508 @default.
- W2039566261 hasConcept C97355855 @default.
- W2039566261 hasConceptScore W2039566261C111368507 @default.
- W2039566261 hasConceptScore W2039566261C121332964 @default.
- W2039566261 hasConceptScore W2039566261C127313418 @default.
- W2039566261 hasConceptScore W2039566261C144082473 @default.
- W2039566261 hasConceptScore W2039566261C147789679 @default.
- W2039566261 hasConceptScore W2039566261C160671074 @default.
- W2039566261 hasConceptScore W2039566261C171250308 @default.
- W2039566261 hasConceptScore W2039566261C18168003 @default.
- W2039566261 hasConceptScore W2039566261C185592680 @default.
- W2039566261 hasConceptScore W2039566261C191897082 @default.
- W2039566261 hasConceptScore W2039566261C192562407 @default.
- W2039566261 hasConceptScore W2039566261C2777289219 @default.
- W2039566261 hasConceptScore W2039566261C2779133538 @default.
- W2039566261 hasConceptScore W2039566261C37487178 @default.
- W2039566261 hasConceptScore W2039566261C544956773 @default.
- W2039566261 hasConceptScore W2039566261C69357855 @default.
- W2039566261 hasConceptScore W2039566261C87976508 @default.
- W2039566261 hasConceptScore W2039566261C97355855 @default.
- W2039566261 hasIssue "6" @default.
- W2039566261 hasLocation W20395662611 @default.
- W2039566261 hasOpenAccess W2039566261 @default.
- W2039566261 hasPrimaryLocation W20395662611 @default.
- W2039566261 hasRelatedWork W1918018431 @default.
- W2039566261 hasRelatedWork W2017814565 @default.
- W2039566261 hasRelatedWork W2028006251 @default.
- W2039566261 hasRelatedWork W2038032548 @default.
- W2039566261 hasRelatedWork W2079361729 @default.
- W2039566261 hasRelatedWork W2090713648 @default.
- W2039566261 hasRelatedWork W2097941307 @default.
- W2039566261 hasRelatedWork W2115430288 @default.
- W2039566261 hasRelatedWork W4242353021 @default.
- W2039566261 hasRelatedWork W4310664472 @default.
- W2039566261 hasVolume "3" @default.
- W2039566261 isParatext "false" @default.
- W2039566261 isRetracted "false" @default.
- W2039566261 magId "2039566261" @default.
- W2039566261 workType "article" @default.