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• W2039587466 abstract "The adsorption of diethylamine (DEA) on Si(1 0 0) at 100 K was investigated using high-resolution electron energy loss spectroscopy (HREELS) and electron stimulated desorption (ESD). The thermal evolution of DEA on Si(1 0 0) was studied using temperature programmed desorption (TPD). Our results demonstrate DEA bonds datively to the Si(1 0 0) surface with no dissociation at 100 K. Thermal desorption of DEA takes place via a β-hydride elimination process leaving virtually no carbon behind. Electronic processing of DEA/Si(1 0 0) at 100 K results in desorption of ethyl groups; however, carbon and nitrogen are deposited on the surface as a result of electron irradiation. Thermal removal of carbon and nitrogen was not possible, indicating the formation of silicon carbide and silicon nitride." @default.
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• W2039587466 date "2008-01-01" @default.
• W2039587466 modified "2023-10-17" @default.
• W2039587466 title "HREELS study of the adsorption and evolution of diethylamine (DEA) on Si(100) surfaces" @default.
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• W2039587466 doi "https://doi.org/10.1016/j.apsusc.2007.07.133" @default.
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