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- W2039606017 abstract "Layers of ZnO micro-nano structures were deposited on quartz substrates and subsequently plasma treated in O2 and N2. It was found that exposure to O2 plasma enhanced gas response to ethanol vapor of the ZnO layers by a factor eight, while exposure to N2 plasma deteriorated the gas response. The gas response enhancement upon O2 plasma treatment could be correlated to an increase in the layer resistance combined with surface roughening of the original ZnO tetrapod structure, suggesting the formation of a ZnO surface with a high density of active sites for ambient oxygen adsorption and subsequent reaction with reducing gases such as ethanol vapor." @default.
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- W2039606017 date "2009-01-01" @default.
- W2039606017 modified "2023-10-12" @default.
- W2039606017 title "Enhancement of Gas Response of ZnO Micro-nano Structured Films through O2 Plasma Treatment" @default.
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- W2039606017 doi "https://doi.org/10.1541/ieejsmas.129.307" @default.
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