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- W2039657309 abstract "ABSTRACT Micromachine technologies based on IC-compatible micromachining have advantages denoted by three M's'.Miniaturization is the most popular but Multiplicity, which means the batch fabrication capability of many complicatedelements, and Microelectronics to control motions or to add different functions such as the optical function are equallyimportant. This paper deals with the application of micromachine technologies to micro optical devices. A basic conceptmaking the best use of the advantages is proposed. Recent examples of optical microelectromechanical systems(MEMS) are reviewed. Keywords: MEMS, micromachine, optics, microactuator, LIGA process, silicon 1. INTRODUCTIONStudies on micromechanical systems(MEMS) have reached such stage that we can built three dimensional microstructures on a silicon substrate and operate micromotors/actuators without particular difficulty[1,2]. Now we mustidentify practical applications of MEMS in order to accelerate the development. Figure 1 shows application opportunities ofmicroactuators and MEMS[3J. Promising applications of MEMS for the near future will be in optics[4-40J, magnetic andoptical heads[1 1, 12], fluidics[13, 14], OA apparatus[15], the handling of cells and macro molecules[16,17}, and microscopywith microprobes{1&.'22] such as STMs (scanning tunneling microscopes) and AFMs (atomic force microscopes). Theseapplications have a common feature in that only very light objects such as mirrors, heads, valves, cells and microprobes aremanipulated and that little physical interaction with the external environment is necessary. One reason is that presentmicroactuators are still primitive and large forces cannot be transmitted to the external world. The other reason is difficulty inpackaging.All the mechanical work can be completed within a microsystem for optical applications. Non contact interfacingbetween the microsystem and the external world is possible. In addition, most of the optical components such as lasers," @default.
- W2039657309 created "2016-06-24" @default.
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- W2039657309 date "1996-09-13" @default.
- W2039657309 modified "2023-10-03" @default.
- W2039657309 title "Application of micromachining technology to optical devices and systems (Same as Vols. 2881 and 2882, p. 2)" @default.
- W2039657309 doi "https://doi.org/10.1117/12.250965" @default.
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