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• W2039677792 abstract "We propose the use of binary slanted surface-relief gratings with parallel-groove walls as input and output couplers in a planar optical interconnect. Parametric optimization of cascaded output couplers is employed to design an interconnect consisting of N output couplers producing a uniform intensity distribution with a high efficiency that may be realized in one lithographic etching step. The sensitivity of a N = 4 interconnect to various fabrication errors is analyzed. We demonstrate the operation of a slanted surface-relief grating manufactured with electron-beam lithography and reactive-ion etching for an operating wavelength of lambda = 0.633 mum." @default.
• W2039677792 created "2016-06-24" @default.
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• W2039677792 date "1997-08-10" @default.
• W2039677792 modified "2023-10-17" @default.
• W2039677792 title "Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection" @default.
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• W2039677792 doi "https://doi.org/10.1364/ao.36.005717" @default.
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