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- W2039765891 abstract "Excimer laser microetching is applied on various substrate materials, including metals, metal alloys, semiconductors, and polymers, of arbitrary geometrical shape for fabricating surface-relief optical microstructures with very fine features (micron width/micron depth, or less). Particularly good results have been obtained with hardened photoresist, lithium niobate crystals, and stainless steel. The method is based on selective laser ablative etching achieved by projecting a mask, on a reduction basis, onto the substrate material. In addition to simple rectangular metal masks, computer generated holographic mask patterns were used. These hologram masters were optically plotted on photoresist, and then wet etched to produce chrome-on-quartz masks. A consecutive step-and-repeat method was used to replicate the mask on the substrate. Several types of surface relief holograms were directly etched on various materials. One class of holograms upon reconstruction produces an 8 X 8 square optical interconnect array. Another type reproduces a specific design pattern consisting of characters and numbers. Full automation of the microetching process in conjunction with a raster scanning method allows the fabrication of arbitrary pixellated multilevel micro-patterns. The direct nature of the etching technique appears to be very attractive since it eliminates the need for substrate material pre- or post-processing and can be applied to almost any solid material." @default.
- W2039765891 created "2016-06-24" @default.
- W2039765891 creator A5018109506 @default.
- W2039765891 creator A5045405469 @default.
- W2039765891 creator A5049378346 @default.
- W2039765891 creator A5050561485 @default.
- W2039765891 creator A5052667131 @default.
- W2039765891 creator A5053102019 @default.
- W2039765891 creator A5086593710 @default.
- W2039765891 creator A5087609531 @default.
- W2039765891 creator A5090677730 @default.
- W2039765891 date "1995-04-10" @default.
- W2039765891 modified "2023-09-23" @default.
- W2039765891 title "Computer-generated holographic diffractive structures fabricated by direct excimer laser microetching" @default.
- W2039765891 doi "https://doi.org/10.1117/12.206284" @default.
- W2039765891 hasPublicationYear "1995" @default.
- W2039765891 type Work @default.
- W2039765891 sameAs 2039765891 @default.
- W2039765891 citedByCount "0" @default.
- W2039765891 crossrefType "proceedings-article" @default.
- W2039765891 hasAuthorship W2039765891A5018109506 @default.
- W2039765891 hasAuthorship W2039765891A5045405469 @default.
- W2039765891 hasAuthorship W2039765891A5049378346 @default.
- W2039765891 hasAuthorship W2039765891A5050561485 @default.
- W2039765891 hasAuthorship W2039765891A5052667131 @default.
- W2039765891 hasAuthorship W2039765891A5053102019 @default.
- W2039765891 hasAuthorship W2039765891A5086593710 @default.
- W2039765891 hasAuthorship W2039765891A5087609531 @default.
- W2039765891 hasAuthorship W2039765891A5090677730 @default.
- W2039765891 hasConcept C100460472 @default.
- W2039765891 hasConcept C111368507 @default.
- W2039765891 hasConcept C120665830 @default.
- W2039765891 hasConcept C121332964 @default.
- W2039765891 hasConcept C127313418 @default.
- W2039765891 hasConcept C134406635 @default.
- W2039765891 hasConcept C136525101 @default.
- W2039765891 hasConcept C138113353 @default.
- W2039765891 hasConcept C142724271 @default.
- W2039765891 hasConcept C145406643 @default.
- W2039765891 hasConcept C159985019 @default.
- W2039765891 hasConcept C171250308 @default.
- W2039765891 hasConcept C187590223 @default.
- W2039765891 hasConcept C192562407 @default.
- W2039765891 hasConcept C204787440 @default.
- W2039765891 hasConcept C2777207636 @default.
- W2039765891 hasConcept C2777289219 @default.
- W2039765891 hasConcept C2779227376 @default.
- W2039765891 hasConcept C2780477314 @default.
- W2039765891 hasConcept C49040817 @default.
- W2039765891 hasConcept C520434653 @default.
- W2039765891 hasConcept C71924100 @default.
- W2039765891 hasConceptScore W2039765891C100460472 @default.
- W2039765891 hasConceptScore W2039765891C111368507 @default.
- W2039765891 hasConceptScore W2039765891C120665830 @default.
- W2039765891 hasConceptScore W2039765891C121332964 @default.
- W2039765891 hasConceptScore W2039765891C127313418 @default.
- W2039765891 hasConceptScore W2039765891C134406635 @default.
- W2039765891 hasConceptScore W2039765891C136525101 @default.
- W2039765891 hasConceptScore W2039765891C138113353 @default.
- W2039765891 hasConceptScore W2039765891C142724271 @default.
- W2039765891 hasConceptScore W2039765891C145406643 @default.
- W2039765891 hasConceptScore W2039765891C159985019 @default.
- W2039765891 hasConceptScore W2039765891C171250308 @default.
- W2039765891 hasConceptScore W2039765891C187590223 @default.
- W2039765891 hasConceptScore W2039765891C192562407 @default.
- W2039765891 hasConceptScore W2039765891C204787440 @default.
- W2039765891 hasConceptScore W2039765891C2777207636 @default.
- W2039765891 hasConceptScore W2039765891C2777289219 @default.
- W2039765891 hasConceptScore W2039765891C2779227376 @default.
- W2039765891 hasConceptScore W2039765891C2780477314 @default.
- W2039765891 hasConceptScore W2039765891C49040817 @default.
- W2039765891 hasConceptScore W2039765891C520434653 @default.
- W2039765891 hasConceptScore W2039765891C71924100 @default.
- W2039765891 hasLocation W20397658911 @default.
- W2039765891 hasOpenAccess W2039765891 @default.
- W2039765891 hasPrimaryLocation W20397658911 @default.
- W2039765891 hasRelatedWork W1974900369 @default.
- W2039765891 hasRelatedWork W2018199707 @default.
- W2039765891 hasRelatedWork W2023254426 @default.
- W2039765891 hasRelatedWork W2039765891 @default.
- W2039765891 hasRelatedWork W2040348440 @default.
- W2039765891 hasRelatedWork W2378994055 @default.
- W2039765891 hasRelatedWork W2385387985 @default.
- W2039765891 hasRelatedWork W2544283468 @default.
- W2039765891 hasRelatedWork W2993655302 @default.
- W2039765891 hasRelatedWork W3089192072 @default.
- W2039765891 isParatext "false" @default.
- W2039765891 isRetracted "false" @default.
- W2039765891 magId "2039765891" @default.
- W2039765891 workType "article" @default.