Matches in SemOpenAlex for { <https://semopenalex.org/work/W2039773911> ?p ?o ?g. }
- W2039773911 endingPage "125305" @default.
- W2039773911 startingPage "125305" @default.
- W2039773911 abstract "The nanoimprint lithography process consists of two mechanical steps: molding and stamp removal. While many publications dealing with anti-sticking layer properties or the understanding of polymer flow during imprinting have recently been published, only a few studies have been carried out to deeply characterize the demolding step. Regarding the small amount of theoretical work dedicated to this issue, in this paper both experimental and first theoretical approaches are proposed to characterize the demolding process in a peeling scheme. Full 200 mm stamp and imprinted wafers were used to identify the experimental limitation of such a full wafer peeling demolding scheme. A rectangular stamp and substrate samples with or without nanoscale features combined with an augmented beam theory are proposed to extract quantitative data for the required demolding force as well as the friction stress along the feature sidewall. Therefore both adhesion and friction forces were characterized on single stamp structures." @default.
- W2039773911 created "2016-06-24" @default.
- W2039773911 creator A5060375416 @default.
- W2039773911 creator A5061376396 @default.
- W2039773911 creator A5071932285 @default.
- W2039773911 creator A5089803443 @default.
- W2039773911 date "2008-02-20" @default.
- W2039773911 modified "2023-09-24" @default.
- W2039773911 title "Quantitative characterizations of a nanopatterned bonded wafer: force determination for nanoimprint lithography stamp removal" @default.
- W2039773911 cites W1964958541 @default.
- W2039773911 cites W1967011690 @default.
- W2039773911 cites W1971020131 @default.
- W2039773911 cites W1978679765 @default.
- W2039773911 cites W1983114298 @default.
- W2039773911 cites W1985360585 @default.
- W2039773911 cites W1985872365 @default.
- W2039773911 cites W1986456852 @default.
- W2039773911 cites W1989574941 @default.
- W2039773911 cites W2002732459 @default.
- W2039773911 cites W2003123106 @default.
- W2039773911 cites W2009294596 @default.
- W2039773911 cites W2009931610 @default.
- W2039773911 cites W2010784362 @default.
- W2039773911 cites W2012054454 @default.
- W2039773911 cites W2016747575 @default.
- W2039773911 cites W2021514234 @default.
- W2039773911 cites W2023166194 @default.
- W2039773911 cites W2024650096 @default.
- W2039773911 cites W2027454095 @default.
- W2039773911 cites W2030164607 @default.
- W2039773911 cites W2030984196 @default.
- W2039773911 cites W2036284768 @default.
- W2039773911 cites W2038876225 @default.
- W2039773911 cites W2049551864 @default.
- W2039773911 cites W2053887700 @default.
- W2039773911 cites W2055379954 @default.
- W2039773911 cites W2061286935 @default.
- W2039773911 cites W2062074587 @default.
- W2039773911 cites W2067918294 @default.
- W2039773911 cites W2076545802 @default.
- W2039773911 cites W2078177619 @default.
- W2039773911 cites W2089236406 @default.
- W2039773911 cites W2090078529 @default.
- W2039773911 cites W2132694229 @default.
- W2039773911 cites W2138368127 @default.
- W2039773911 cites W2142607639 @default.
- W2039773911 cites W2169050949 @default.
- W2039773911 cites W4300115051 @default.
- W2039773911 cites W4300891271 @default.
- W2039773911 cites W80735681 @default.
- W2039773911 doi "https://doi.org/10.1088/0957-4484/19/12/125305" @default.
- W2039773911 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/21817726" @default.
- W2039773911 hasPublicationYear "2008" @default.
- W2039773911 type Work @default.
- W2039773911 sameAs 2039773911 @default.
- W2039773911 citedByCount "27" @default.
- W2039773911 countsByYear W20397739112013 @default.
- W2039773911 countsByYear W20397739112014 @default.
- W2039773911 countsByYear W20397739112015 @default.
- W2039773911 countsByYear W20397739112018 @default.
- W2039773911 countsByYear W20397739112019 @default.
- W2039773911 countsByYear W20397739112020 @default.
- W2039773911 countsByYear W20397739112021 @default.
- W2039773911 countsByYear W20397739112022 @default.
- W2039773911 countsByYear W20397739112023 @default.
- W2039773911 crossrefType "journal-article" @default.
- W2039773911 hasAuthorship W2039773911A5060375416 @default.
- W2039773911 hasAuthorship W2039773911A5061376396 @default.
- W2039773911 hasAuthorship W2039773911A5071932285 @default.
- W2039773911 hasAuthorship W2039773911A5089803443 @default.
- W2039773911 hasConcept C111368507 @default.
- W2039773911 hasConcept C118524077 @default.
- W2039773911 hasConcept C127313418 @default.
- W2039773911 hasConcept C136525101 @default.
- W2039773911 hasConcept C142724271 @default.
- W2039773911 hasConcept C159985019 @default.
- W2039773911 hasConcept C160671074 @default.
- W2039773911 hasConcept C171250308 @default.
- W2039773911 hasConcept C192562407 @default.
- W2039773911 hasConcept C198721007 @default.
- W2039773911 hasConcept C204223013 @default.
- W2039773911 hasConcept C204787440 @default.
- W2039773911 hasConcept C2777046567 @default.
- W2039773911 hasConcept C2777289219 @default.
- W2039773911 hasConcept C45206210 @default.
- W2039773911 hasConcept C49040817 @default.
- W2039773911 hasConcept C67558686 @default.
- W2039773911 hasConcept C71924100 @default.
- W2039773911 hasConcept C84416704 @default.
- W2039773911 hasConceptScore W2039773911C111368507 @default.
- W2039773911 hasConceptScore W2039773911C118524077 @default.
- W2039773911 hasConceptScore W2039773911C127313418 @default.
- W2039773911 hasConceptScore W2039773911C136525101 @default.
- W2039773911 hasConceptScore W2039773911C142724271 @default.
- W2039773911 hasConceptScore W2039773911C159985019 @default.
- W2039773911 hasConceptScore W2039773911C160671074 @default.
- W2039773911 hasConceptScore W2039773911C171250308 @default.
- W2039773911 hasConceptScore W2039773911C192562407 @default.