FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2039779175> ?p ?o ?g. }

• W2039779175 abstract "Abstract Thin SiC films were fabricated using hybrid laser‐magnetron deposition system and pulsed laser deposition (PLD). In the hybrid system, a KrF excimer laser was used for deposition of carbon and magnetron at the same time for sputtering of Si species. Films were fabricated in hydrogen/argon, or in argon ambient. Results were compared with SiC films created using PLD only. Substrate temperature ( T s ) was changed from room temperature (RT) up to 800 °C. Film topology, crystallinity, composition and chemical bonds were studied. Polycrystalline SiC films were prepared by both deposition techniques, in argon atmosphere, for T s > 600 °C." @default.
• W2039779175 created "2016-06-24" @default.
• W2039779175 creator A5032101684 @default.
• W2039779175 creator A5037993584 @default.
• W2039779175 creator A5046911823 @default.
• W2039779175 creator A5060046687 @default.
• W2039779175 date "2009-06-01" @default.
• W2039779175 modified "2023-09-26" @default.
• W2039779175 title "SiCxLayers Prepared by Hybrid Laser Deposition and PLD" @default.
• W2039779175 cites W1986945475 @default.
• W2039779175 cites W1992214743 @default.
• W2039779175 cites W2002405973 @default.
• W2039779175 cites W2005669160 @default.
• W2039779175 cites W2051440931 @default.
• W2039779175 cites W2079913017 @default.
• W2039779175 cites W2086542027 @default.
• W2039779175 cites W2120434167 @default.
• W2039779175 cites W2167965317 @default.
• W2039779175 cites W2170918540 @default.
• W2039779175 cites W2487539117 @default.
• W2039779175 cites W4241475900 @default.
• W2039779175 doi "https://doi.org/10.1002/ppap.200930803" @default.
• W2039779175 hasPublicationYear "2009" @default.
• W2039779175 type Work @default.
• W2039779175 sameAs 2039779175 @default.
• W2039779175 citedByCount "4" @default.
• W2039779175 countsByYear W20397791752013 @default.
• W2039779175 countsByYear W20397791752014 @default.
• W2039779175 countsByYear W20397791752019 @default.
• W2039779175 countsByYear W20397791752021 @default.
• W2039779175 crossrefType "journal-article" @default.
• W2039779175 hasAuthorship W2039779175A5032101684 @default.
• W2039779175 hasAuthorship W2039779175A5037993584 @default.
• W2039779175 hasAuthorship W2039779175A5046911823 @default.
• W2039779175 hasAuthorship W2039779175A5060046687 @default.
• W2039779175 hasBestOaLocation W20397791751 @default.
• W2039779175 hasConcept C111368507 @default.
• W2039779175 hasConcept C113196181 @default.
• W2039779175 hasConcept C120665830 @default.
• W2039779175 hasConcept C121332964 @default.
• W2039779175 hasConcept C123408415 @default.
• W2039779175 hasConcept C127313418 @default.
• W2039779175 hasConcept C127413603 @default.
• W2039779175 hasConcept C137637335 @default.
• W2039779175 hasConcept C151730666 @default.
• W2039779175 hasConcept C159985019 @default.
• W2039779175 hasConcept C171250308 @default.
• W2039779175 hasConcept C178790620 @default.
• W2039779175 hasConcept C185592680 @default.
• W2039779175 hasConcept C19067145 @default.
• W2039779175 hasConcept C191897082 @default.
• W2039779175 hasConcept C192562407 @default.
• W2039779175 hasConcept C22423302 @default.
• W2039779175 hasConcept C2777289219 @default.
• W2039779175 hasConcept C2780477314 @default.
• W2039779175 hasConcept C2816523 @default.
• W2039779175 hasConcept C37982897 @default.
• W2039779175 hasConcept C42360764 @default.
• W2039779175 hasConcept C46275449 @default.
• W2039779175 hasConcept C49040817 @default.
• W2039779175 hasConcept C520434653 @default.
• W2039779175 hasConcept C547737533 @default.
• W2039779175 hasConcept C61427134 @default.
• W2039779175 hasConcept C64297162 @default.
• W2039779175 hasConcept C75937256 @default.
• W2039779175 hasConcept C86803240 @default.
• W2039779175 hasConceptScore W2039779175C111368507 @default.
• W2039779175 hasConceptScore W2039779175C113196181 @default.
• W2039779175 hasConceptScore W2039779175C120665830 @default.
• W2039779175 hasConceptScore W2039779175C121332964 @default.
• W2039779175 hasConceptScore W2039779175C123408415 @default.
• W2039779175 hasConceptScore W2039779175C127313418 @default.
• W2039779175 hasConceptScore W2039779175C127413603 @default.
• W2039779175 hasConceptScore W2039779175C137637335 @default.
• W2039779175 hasConceptScore W2039779175C151730666 @default.
• W2039779175 hasConceptScore W2039779175C159985019 @default.
• W2039779175 hasConceptScore W2039779175C171250308 @default.
• W2039779175 hasConceptScore W2039779175C178790620 @default.
• W2039779175 hasConceptScore W2039779175C185592680 @default.
• W2039779175 hasConceptScore W2039779175C19067145 @default.
• W2039779175 hasConceptScore W2039779175C191897082 @default.
• W2039779175 hasConceptScore W2039779175C192562407 @default.
• W2039779175 hasConceptScore W2039779175C22423302 @default.
• W2039779175 hasConceptScore W2039779175C2777289219 @default.
• W2039779175 hasConceptScore W2039779175C2780477314 @default.
• W2039779175 hasConceptScore W2039779175C2816523 @default.
• W2039779175 hasConceptScore W2039779175C37982897 @default.
• W2039779175 hasConceptScore W2039779175C42360764 @default.
• W2039779175 hasConceptScore W2039779175C46275449 @default.
• W2039779175 hasConceptScore W2039779175C49040817 @default.
• W2039779175 hasConceptScore W2039779175C520434653 @default.
• W2039779175 hasConceptScore W2039779175C547737533 @default.
• W2039779175 hasConceptScore W2039779175C61427134 @default.
• W2039779175 hasConceptScore W2039779175C64297162 @default.
• W2039779175 hasConceptScore W2039779175C75937256 @default.
• W2039779175 hasConceptScore W2039779175C86803240 @default.
• W2039779175 hasIssue "S1" @default.
• W2039779175 hasLocation W20397791751 @default.
• W2039779175 hasOpenAccess W2039779175 @default.
• W2039779175 hasPrimaryLocation W20397791751 @default.

• next