Matches in SemOpenAlex for { <https://semopenalex.org/work/W2039938712> ?p ?o ?g. }
- W2039938712 endingPage "409" @default.
- W2039938712 startingPage "402" @default.
- W2039938712 abstract "A study of the Si incorporation in InP by the hydride vapour phase epitaxy is presented. The Si concentrations are measured versus the partial pressure of SiH4 and PH3 in the vapour phase and versus the growth temperature. For partial pressures of SiH4 varying from 1.5×10−8 to 7.4×10−7 atm, the Si incorporation linearly increased with the partial pressure of SiH4 between 2×1017 and 8.5×1018 at cm−3. The variation of the Si incorporation flux was found logarithmic versus the reciprocal temperature and independent of the partial pressure of PH3. A kinetic model applied to the Si incorporation flux leads to the hypothesis of a direct incorporation of Si in the InP layer and to a Si adsorption activation energy of 10.6 kcal mol−1." @default.
- W2039938712 created "2016-06-24" @default.
- W2039938712 creator A5028270622 @default.
- W2039938712 creator A5030235178 @default.
- W2039938712 creator A5052742892 @default.
- W2039938712 creator A5063650119 @default.
- W2039938712 creator A5064881200 @default.
- W2039938712 creator A5069468222 @default.
- W2039938712 date "1998-09-01" @default.
- W2039938712 modified "2023-09-25" @default.
- W2039938712 title "Kinetic study of Si incorporation in InP by the hydride vapour phase epitaxy" @default.
- W2039938712 cites W1497539666 @default.
- W2039938712 cites W1501804568 @default.
- W2039938712 cites W1621078189 @default.
- W2039938712 cites W1869532670 @default.
- W2039938712 cites W1967049202 @default.
- W2039938712 cites W1967363022 @default.
- W2039938712 cites W1976290363 @default.
- W2039938712 cites W1976912460 @default.
- W2039938712 cites W1987034762 @default.
- W2039938712 cites W1992930848 @default.
- W2039938712 cites W1996561502 @default.
- W2039938712 cites W1998233104 @default.
- W2039938712 cites W2001697107 @default.
- W2039938712 cites W2006621475 @default.
- W2039938712 cites W2019829785 @default.
- W2039938712 cites W2027821544 @default.
- W2039938712 cites W2036096391 @default.
- W2039938712 cites W2076553061 @default.
- W2039938712 cites W2478121256 @default.
- W2039938712 doi "https://doi.org/10.1016/s0022-0248(98)00443-6" @default.
- W2039938712 hasPublicationYear "1998" @default.
- W2039938712 type Work @default.
- W2039938712 sameAs 2039938712 @default.
- W2039938712 citedByCount "1" @default.
- W2039938712 crossrefType "journal-article" @default.
- W2039938712 hasAuthorship W2039938712A5028270622 @default.
- W2039938712 hasAuthorship W2039938712A5030235178 @default.
- W2039938712 hasAuthorship W2039938712A5052742892 @default.
- W2039938712 hasAuthorship W2039938712A5063650119 @default.
- W2039938712 hasAuthorship W2039938712A5064881200 @default.
- W2039938712 hasAuthorship W2039938712A5069468222 @default.
- W2039938712 hasConcept C110738630 @default.
- W2039938712 hasConcept C113196181 @default.
- W2039938712 hasConcept C121332964 @default.
- W2039938712 hasConcept C135889238 @default.
- W2039938712 hasConcept C147789679 @default.
- W2039938712 hasConcept C178790620 @default.
- W2039938712 hasConcept C185592680 @default.
- W2039938712 hasConcept C2777961443 @default.
- W2039938712 hasConcept C2779227376 @default.
- W2039938712 hasConcept C3018640491 @default.
- W2039938712 hasConcept C3020013744 @default.
- W2039938712 hasConcept C44280652 @default.
- W2039938712 hasConcept C540031477 @default.
- W2039938712 hasConcept C544153396 @default.
- W2039938712 hasConcept C544956773 @default.
- W2039938712 hasConcept C62520636 @default.
- W2039938712 hasConcept C68463220 @default.
- W2039938712 hasConcept C95121573 @default.
- W2039938712 hasConcept C97355855 @default.
- W2039938712 hasConceptScore W2039938712C110738630 @default.
- W2039938712 hasConceptScore W2039938712C113196181 @default.
- W2039938712 hasConceptScore W2039938712C121332964 @default.
- W2039938712 hasConceptScore W2039938712C135889238 @default.
- W2039938712 hasConceptScore W2039938712C147789679 @default.
- W2039938712 hasConceptScore W2039938712C178790620 @default.
- W2039938712 hasConceptScore W2039938712C185592680 @default.
- W2039938712 hasConceptScore W2039938712C2777961443 @default.
- W2039938712 hasConceptScore W2039938712C2779227376 @default.
- W2039938712 hasConceptScore W2039938712C3018640491 @default.
- W2039938712 hasConceptScore W2039938712C3020013744 @default.
- W2039938712 hasConceptScore W2039938712C44280652 @default.
- W2039938712 hasConceptScore W2039938712C540031477 @default.
- W2039938712 hasConceptScore W2039938712C544153396 @default.
- W2039938712 hasConceptScore W2039938712C544956773 @default.
- W2039938712 hasConceptScore W2039938712C62520636 @default.
- W2039938712 hasConceptScore W2039938712C68463220 @default.
- W2039938712 hasConceptScore W2039938712C95121573 @default.
- W2039938712 hasConceptScore W2039938712C97355855 @default.
- W2039938712 hasIssue "3-4" @default.
- W2039938712 hasLocation W20399387121 @default.
- W2039938712 hasOpenAccess W2039938712 @default.
- W2039938712 hasPrimaryLocation W20399387121 @default.
- W2039938712 hasRelatedWork W1964162421 @default.
- W2039938712 hasRelatedWork W1990993445 @default.
- W2039938712 hasRelatedWork W2001322539 @default.
- W2039938712 hasRelatedWork W2015881487 @default.
- W2039938712 hasRelatedWork W2022024170 @default.
- W2039938712 hasRelatedWork W2023103230 @default.
- W2039938712 hasRelatedWork W2023934939 @default.
- W2039938712 hasRelatedWork W2029925733 @default.
- W2039938712 hasRelatedWork W2046723140 @default.
- W2039938712 hasRelatedWork W2059832790 @default.
- W2039938712 hasRelatedWork W2060518529 @default.
- W2039938712 hasRelatedWork W2061675678 @default.
- W2039938712 hasRelatedWork W2062197205 @default.
- W2039938712 hasRelatedWork W2064826525 @default.