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• W2039968798 abstract "Abstract Polycrystalline alloys have been sputtered using a 4 keV Ar+ ion beam. The experiment has been modelled using different computer simulation techniques—static and dynamic Monte Carlo simulation, and a binary collision lattice code. A comparison between the results of the experiment and the simulations and among the different computer programs has been made. These are also compared with the predictions of the linear cascade theory. The relative importance of the surface binding energy, of the depth of origin and of the modified steady-state surface composition on the observed angular dependence of the deposit composition are assessed." @default.
• W2039968798 created "2016-06-24" @default.
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• W2039968798 date "1993-03-01" @default.
• W2039968798 modified "2023-09-27" @default.
• W2039968798 title "Sputtering of NiTi alloys: a comparison of experiment and simulation" @default.
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• W2039968798 doi "https://doi.org/10.1016/0042-207x(93)90155-4" @default.
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