FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2039994485> ?p ?o ?g. }

• W2039994485 endingPage "6208" @default.
• W2039994485 startingPage "6206" @default.
• W2039994485 abstract "Cl2, HCl, and HBr added BCl3-based inductively coupled plasmas were used to etch (0001) sapphire wafers and their etch characteristics were investigated. The plasma characteristics were monitored in-situ by optical emission spectroscopy and a Langmuir probe. A photoresist was used as the etch mask and an etch selectivity greater than 1 with the etch rate of 3800 Å/min could be obtained with 20%HCl/80%BCl3. The most anisotropic etch profile could be observed in 10%HBr/90%BCl3." @default.
• W2039994485 created "2016-06-24" @default.
• W2039994485 creator A5011967848 @default.
• W2039994485 creator A5040221900 @default.
• W2039994485 creator A5068292935 @default.
• W2039994485 creator A5077884187 @default.
• W2039994485 date "2002-10-15" @default.
• W2039994485 modified "2023-09-27" @default.
• W2039994485 title "A Study of Sapphire Etching Characteristics Using BCl3-based Inductively Coupled Plasmas" @default.
• W2039994485 cites W1993853364 @default.
• W2039994485 cites W2095222562 @default.
• W2039994485 cites W2133856537 @default.
• W2039994485 cites W2171964197 @default.
• W2039994485 cites W597809786 @default.
• W2039994485 doi "https://doi.org/10.1143/jjap.41.6206" @default.
• W2039994485 hasPublicationYear "2002" @default.
• W2039994485 type Work @default.
• W2039994485 sameAs 2039994485 @default.
• W2039994485 citedByCount "19" @default.
• W2039994485 countsByYear W20399944852013 @default.
• W2039994485 countsByYear W20399944852014 @default.
• W2039994485 countsByYear W20399944852017 @default.
• W2039994485 countsByYear W20399944852018 @default.
• W2039994485 countsByYear W20399944852019 @default.
• W2039994485 countsByYear W20399944852020 @default.
• W2039994485 countsByYear W20399944852021 @default.
• W2039994485 crossrefType "journal-article" @default.
• W2039994485 hasAuthorship W2039994485A5011967848 @default.
• W2039994485 hasAuthorship W2039994485A5040221900 @default.
• W2039994485 hasAuthorship W2039994485A5068292935 @default.
• W2039994485 hasAuthorship W2039994485A5077884187 @default.
• W2039994485 hasConcept C100460472 @default.
• W2039994485 hasConcept C107187091 @default.
• W2039994485 hasConcept C113196181 @default.
• W2039994485 hasConcept C120665830 @default.
• W2039994485 hasConcept C121332964 @default.
• W2039994485 hasConcept C1291036 @default.
• W2039994485 hasConcept C130472188 @default.
• W2039994485 hasConcept C134406635 @default.
• W2039994485 hasConcept C145148216 @default.
• W2039994485 hasConcept C160671074 @default.
• W2039994485 hasConcept C171250308 @default.
• W2039994485 hasConcept C176118016 @default.
• W2039994485 hasConcept C178790620 @default.
• W2039994485 hasConcept C185592680 @default.
• W2039994485 hasConcept C192562407 @default.
• W2039994485 hasConcept C196009443 @default.
• W2039994485 hasConcept C2779227376 @default.
• W2039994485 hasConcept C2780064504 @default.
• W2039994485 hasConcept C43503373 @default.
• W2039994485 hasConcept C43617362 @default.
• W2039994485 hasConcept C49040817 @default.
• W2039994485 hasConcept C520434653 @default.
• W2039994485 hasConcept C62520636 @default.
• W2039994485 hasConcept C81626474 @default.
• W2039994485 hasConcept C82706917 @default.
• W2039994485 hasConcept C95974651 @default.
• W2039994485 hasConceptScore W2039994485C100460472 @default.
• W2039994485 hasConceptScore W2039994485C107187091 @default.
• W2039994485 hasConceptScore W2039994485C113196181 @default.
• W2039994485 hasConceptScore W2039994485C120665830 @default.
• W2039994485 hasConceptScore W2039994485C121332964 @default.
• W2039994485 hasConceptScore W2039994485C1291036 @default.
• W2039994485 hasConceptScore W2039994485C130472188 @default.
• W2039994485 hasConceptScore W2039994485C134406635 @default.
• W2039994485 hasConceptScore W2039994485C145148216 @default.
• W2039994485 hasConceptScore W2039994485C160671074 @default.
• W2039994485 hasConceptScore W2039994485C171250308 @default.
• W2039994485 hasConceptScore W2039994485C176118016 @default.
• W2039994485 hasConceptScore W2039994485C178790620 @default.
• W2039994485 hasConceptScore W2039994485C185592680 @default.
• W2039994485 hasConceptScore W2039994485C192562407 @default.
• W2039994485 hasConceptScore W2039994485C196009443 @default.
• W2039994485 hasConceptScore W2039994485C2779227376 @default.
• W2039994485 hasConceptScore W2039994485C2780064504 @default.
• W2039994485 hasConceptScore W2039994485C43503373 @default.
• W2039994485 hasConceptScore W2039994485C43617362 @default.
• W2039994485 hasConceptScore W2039994485C49040817 @default.
• W2039994485 hasConceptScore W2039994485C520434653 @default.
• W2039994485 hasConceptScore W2039994485C62520636 @default.
• W2039994485 hasConceptScore W2039994485C81626474 @default.
• W2039994485 hasConceptScore W2039994485C82706917 @default.
• W2039994485 hasConceptScore W2039994485C95974651 @default.
• W2039994485 hasIssue "Part 1, No. 10" @default.
• W2039994485 hasLocation W20399944851 @default.
• W2039994485 hasOpenAccess W2039994485 @default.
• W2039994485 hasPrimaryLocation W20399944851 @default.
• W2039994485 hasRelatedWork W1992219747 @default.
• W2039994485 hasRelatedWork W2006657395 @default.
• W2039994485 hasRelatedWork W2010923447 @default.
• W2039994485 hasRelatedWork W2031434171 @default.
• W2039994485 hasRelatedWork W2039994485 @default.
• W2039994485 hasRelatedWork W2058073626 @default.
• W2039994485 hasRelatedWork W2065108417 @default.
• W2039994485 hasRelatedWork W2118045353 @default.
• W2039994485 hasRelatedWork W2161825519 @default.
• W2039994485 hasRelatedWork W2373699431 @default.
• W2039994485 hasVolume "41" @default.

• next