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- W2040111704 abstract "In Part IV of the present treatise epitaxial silicon layer doping governed by the ratelimiting action of more than one kind of dopant species in the gas is investigated on the theoretical basis which has been derived in the previously published parts. It is shown that both the general reaction scheme of forward and backward reaction steps and the general differential equation statement of counterbalancing the fluxes of those reaction steps and the dopant incorporation flux are suitable for solving the problem under consideration. Only two of the four incorporation-limiting reaction mechanisms, being discussed in the more recent literature, fulfill the requirements needed to agree with experimental findings on the one hand and with the limiting case situation of equilibrium incorporation on the other. Arsenic has been selected as the demonstrating dopant element. Im vierten Teil der vorliegenden Arbeit wird die Dotierung epitaktischer Siliciumschichten für den Fall untersucht, daß mehr als nur eine Art von Dotandenspezies im Gas bestimmend am Einbaugeschehen teilnimmt. Hierfür wird die in den vorangegangenen Teilen entwickelte theoretische Grundlage verwendet. Sowohl das allgemeine Reaktionsschema der Hin- und Rückreaktionen als auch der allgemeine Differentialgleichungsansatz zur Bilanz der Reaktionsströme und des Dotierungseinbaustromes sind für die Lösung des betrachteten Problems erforderlich. Nur zwei der vier in der gegenwärtigen Literatur vorgeschlagenen, den Einbau begrenzenden Reaktionsmechanismen erfüllen die Forderungen, die zu Einbaugesetzen führen, welche einerseits mit den experimentellen Befunden und andererseits mit dem Grenzfall des Gleichgewichtseinbaus übereinstimmen." @default.
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- W2040111704 date "1987-07-01" @default.
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- W2040111704 title "The current understanding of epitaxial CVD silicon layer doping in the light of modelling and theory development (IV). The problem of more-than-one kind of dopant species" @default.
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- W2040111704 doi "https://doi.org/10.1002/crat.2170220705" @default.
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