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- W2040177876 endingPage "536" @default.
- W2040177876 startingPage "534" @default.
- W2040177876 abstract "Incoherent vacuum ultraviolet (VUV) light has been used to deposit aluminum from photodissociated trimethylaluminum vapor at room temperature. The depositions of aluminum on quartz, silicon, and sapphire show distinct patterns of the shadow mask that was used to shield areas of the substrate from the VUV light beam. Because of its simplicity and low cost, this new method may provide an attractive alternative to presently used methods for depositing metals, semiconductors, and insulators." @default.
- W2040177876 created "2016-06-24" @default.
- W2040177876 creator A5014166333 @default.
- W2040177876 creator A5066631003 @default.
- W2040177876 creator A5086495502 @default.
- W2040177876 date "1983-04-01" @default.
- W2040177876 modified "2023-10-05" @default.
- W2040177876 title "Vacuum ultraviolet driven chemical vapor deposition of localized aluminum thin films" @default.
- W2040177876 doi "https://doi.org/10.1116/1.571925" @default.
- W2040177876 hasPublicationYear "1983" @default.
- W2040177876 type Work @default.
- W2040177876 sameAs 2040177876 @default.
- W2040177876 citedByCount "31" @default.
- W2040177876 countsByYear W20401778762012 @default.
- W2040177876 countsByYear W20401778762019 @default.
- W2040177876 crossrefType "journal-article" @default.
- W2040177876 hasAuthorship W2040177876A5014166333 @default.
- W2040177876 hasAuthorship W2040177876A5066631003 @default.
- W2040177876 hasAuthorship W2040177876A5086495502 @default.
- W2040177876 hasConcept C108225325 @default.
- W2040177876 hasConcept C111368507 @default.
- W2040177876 hasConcept C120665830 @default.
- W2040177876 hasConcept C121332964 @default.
- W2040177876 hasConcept C127313418 @default.
- W2040177876 hasConcept C171250308 @default.
- W2040177876 hasConcept C19067145 @default.
- W2040177876 hasConcept C191897082 @default.
- W2040177876 hasConcept C192562407 @default.
- W2040177876 hasConcept C2776326872 @default.
- W2040177876 hasConcept C2776798109 @default.
- W2040177876 hasConcept C2777289219 @default.
- W2040177876 hasConcept C2779870107 @default.
- W2040177876 hasConcept C2780064504 @default.
- W2040177876 hasConcept C49040817 @default.
- W2040177876 hasConcept C513153333 @default.
- W2040177876 hasConcept C520434653 @default.
- W2040177876 hasConcept C544956773 @default.
- W2040177876 hasConcept C57410435 @default.
- W2040177876 hasConceptScore W2040177876C108225325 @default.
- W2040177876 hasConceptScore W2040177876C111368507 @default.
- W2040177876 hasConceptScore W2040177876C120665830 @default.
- W2040177876 hasConceptScore W2040177876C121332964 @default.
- W2040177876 hasConceptScore W2040177876C127313418 @default.
- W2040177876 hasConceptScore W2040177876C171250308 @default.
- W2040177876 hasConceptScore W2040177876C19067145 @default.
- W2040177876 hasConceptScore W2040177876C191897082 @default.
- W2040177876 hasConceptScore W2040177876C192562407 @default.
- W2040177876 hasConceptScore W2040177876C2776326872 @default.
- W2040177876 hasConceptScore W2040177876C2776798109 @default.
- W2040177876 hasConceptScore W2040177876C2777289219 @default.
- W2040177876 hasConceptScore W2040177876C2779870107 @default.
- W2040177876 hasConceptScore W2040177876C2780064504 @default.
- W2040177876 hasConceptScore W2040177876C49040817 @default.
- W2040177876 hasConceptScore W2040177876C513153333 @default.
- W2040177876 hasConceptScore W2040177876C520434653 @default.
- W2040177876 hasConceptScore W2040177876C544956773 @default.
- W2040177876 hasConceptScore W2040177876C57410435 @default.
- W2040177876 hasIssue "2" @default.
- W2040177876 hasLocation W20401778761 @default.
- W2040177876 hasOpenAccess W2040177876 @default.
- W2040177876 hasPrimaryLocation W20401778761 @default.
- W2040177876 hasRelatedWork W2007882807 @default.
- W2040177876 hasRelatedWork W2051431011 @default.
- W2040177876 hasRelatedWork W2071428881 @default.
- W2040177876 hasRelatedWork W2076739034 @default.
- W2040177876 hasRelatedWork W2077709193 @default.
- W2040177876 hasRelatedWork W2081092201 @default.
- W2040177876 hasRelatedWork W2083791368 @default.
- W2040177876 hasRelatedWork W2145114226 @default.
- W2040177876 hasRelatedWork W3216797648 @default.
- W2040177876 hasRelatedWork W4297796398 @default.
- W2040177876 hasVolume "1" @default.
- W2040177876 isParatext "false" @default.
- W2040177876 isRetracted "false" @default.
- W2040177876 magId "2040177876" @default.
- W2040177876 workType "article" @default.