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- W2040187890 endingPage "3565" @default.
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- W2040187890 abstract "We present calculations of swarm data and rate coefficients for electrons in mixtures of Ar and HBr. The transport data were calculated using a Monte Carlo simulation over a broad range of E/N (electric field E to the gas number density N ratio) and with the idea to provide a basis for models of plasma etching involving HBr. The total cross section has an almost a constant collision frequency, which leads to rather uneventful E/N dependences of the transport data in pure HBr, but the mixtures with Ar involve more complex kinetic phenomena." @default.
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- W2040187890 date "2007-06-06" @default.
- W2040187890 modified "2023-09-26" @default.
- W2040187890 title "Transport Coefficients for Electrons in Mixtures of Ar and HBr" @default.
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- W2040187890 doi "https://doi.org/10.1143/jjap.46.3560" @default.
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