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• W2040241531 abstract "In order to enhance the accuracy of three-component seismic acceleration detection, a novel three-component micro-optoelectronic mechanical systems (MOEMS) accelerometer based on photoelastic effect has been designed. The mechanical properties of sensitive unit under three-component acceleration are analyzed theoretically and a Finite Element Analysis (FEM) simulation is performed simultaneously. Meanwhile, a Mach-Zehnder (M–Z) interferometer which is based on photoelastic effect had been designed and a Beam Propagation Method (BPM) simulation has been processed as well, experimental results indicated that the sensor had a high sensitivity, wide frequency response range and a good linearity in the range of seismic band." @default.
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• W2040241531 date "2011-04-01" @default.
• W2040241531 modified "2023-10-16" @default.
• W2040241531 title "A MOEMS accelerometer based on photoelastic effect" @default.
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• W2040241531 doi "https://doi.org/10.1016/j.ijleo.2010.02.031" @default.
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