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- W2040242958 abstract "Tuning a controller's parameters can sometimes be a very complex and challenging task. Many methods have been used through the years to try and overcome this difficult challenge. In this paper we investigate the linear quadratic regulator (LQR) as a method for giving robust control for the non-linear multiple input multiple output system discussed in this paper. The system is a thermal processing furnace used to anneal 150 mm wafer batches in the 250degC to 450degC range in high vacuum. A plant model was developed which is a hybrid of a physical-law heat-transfer model and measurement data based model of the system. Numerical optimization was used to minimize the difference between measured data and model predicted outputs. Then, multiple linearized models were obtained. LQR was applied to one such model. It achieved the required specifications over the specified temperature range. The important specifications in this application are rise time, steady state accuracy and overshoot which are critical to the process." @default.
- W2040242958 created "2016-06-24" @default.
- W2040242958 creator A5012670033 @default.
- W2040242958 creator A5049340120 @default.
- W2040242958 date "2008-01-01" @default.
- W2040242958 modified "2023-10-17" @default.
- W2040242958 title "Control of a highly non-linear multi-variable thermal processing furnace" @default.
- W2040242958 doi "https://doi.org/10.1049/cp:20080642" @default.
- W2040242958 hasPublicationYear "2008" @default.
- W2040242958 type Work @default.
- W2040242958 sameAs 2040242958 @default.
- W2040242958 citedByCount "1" @default.
- W2040242958 countsByYear W20402429582015 @default.
- W2040242958 crossrefType "proceedings-article" @default.
- W2040242958 hasAuthorship W2040242958A5012670033 @default.
- W2040242958 hasAuthorship W2040242958A5049340120 @default.
- W2040242958 hasConcept C121332964 @default.
- W2040242958 hasConcept C134306372 @default.
- W2040242958 hasConcept C154945302 @default.
- W2040242958 hasConcept C182365436 @default.
- W2040242958 hasConcept C204530211 @default.
- W2040242958 hasConcept C2775924081 @default.
- W2040242958 hasConcept C33923547 @default.
- W2040242958 hasConcept C41008148 @default.
- W2040242958 hasConcept C47446073 @default.
- W2040242958 hasConcept C97355855 @default.
- W2040242958 hasConceptScore W2040242958C121332964 @default.
- W2040242958 hasConceptScore W2040242958C134306372 @default.
- W2040242958 hasConceptScore W2040242958C154945302 @default.
- W2040242958 hasConceptScore W2040242958C182365436 @default.
- W2040242958 hasConceptScore W2040242958C204530211 @default.
- W2040242958 hasConceptScore W2040242958C2775924081 @default.
- W2040242958 hasConceptScore W2040242958C33923547 @default.
- W2040242958 hasConceptScore W2040242958C41008148 @default.
- W2040242958 hasConceptScore W2040242958C47446073 @default.
- W2040242958 hasConceptScore W2040242958C97355855 @default.
- W2040242958 hasLocation W20402429581 @default.
- W2040242958 hasOpenAccess W2040242958 @default.
- W2040242958 hasPrimaryLocation W20402429581 @default.
- W2040242958 hasRelatedWork W1527157925 @default.
- W2040242958 hasRelatedWork W2069249968 @default.
- W2040242958 hasRelatedWork W2076563657 @default.
- W2040242958 hasRelatedWork W2083168563 @default.
- W2040242958 hasRelatedWork W2237115050 @default.
- W2040242958 hasRelatedWork W2368977486 @default.
- W2040242958 hasRelatedWork W2386369021 @default.
- W2040242958 hasRelatedWork W2392775163 @default.
- W2040242958 hasRelatedWork W2393086269 @default.
- W2040242958 hasRelatedWork W2790903936 @default.
- W2040242958 isParatext "false" @default.
- W2040242958 isRetracted "false" @default.
- W2040242958 magId "2040242958" @default.
- W2040242958 workType "article" @default.