FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2040263175> ?p ?o ?g. }

• W2040263175 abstract "High dielectric constant, low loss dielectric thin film materials produced by reactive RF sputtering have been investigated for use as capacitor dielectrics in integrated circuits, using oxides of niobium, tantalum, titanium, hafnium, and zirconium and mixtures of these with aluminum oxide. High breakdown fields and low leakage currents are found for the best materials and a reduction in capacitor area of a factor of &gt;3 compared with Si3N4 capacitors of the same value, using a simple production process compatible with semiconductor device manufacturing." @default.
• W2040263175 created "2016-06-24" @default.
• W2040263175 creator A5019430493 @default.
• W2040263175 creator A5019617764 @default.
• W2040263175 creator A5027370987 @default.
• W2040263175 creator A5046711066 @default.
• W2040263175 creator A5072428776 @default.
• W2040263175 creator A5073437751 @default.
• W2040263175 date "2012-10-09" @default.
• W2040263175 modified "2023-09-26" @default.
• W2040263175 title "Thin film high dielectric constant metal oxides prepared by reactive sputtering" @default.
• W2040263175 cites W1964937889 @default.
• W2040263175 cites W1992557708 @default.
• W2040263175 cites W1998751125 @default.
• W2040263175 cites W2001799651 @default.
• W2040263175 cites W2004662775 @default.
• W2040263175 cites W2026047583 @default.
• W2040263175 cites W2039120278 @default.
• W2040263175 cites W2044299715 @default.
• W2040263175 cites W2059294855 @default.
• W2040263175 cites W2067380071 @default.
• W2040263175 cites W2068939568 @default.
• W2040263175 cites W2079235646 @default.
• W2040263175 cites W2080687295 @default.
• W2040263175 cites W2124402727 @default.
• W2040263175 cites W2156693436 @default.
• W2040263175 cites W2164737678 @default.
• W2040263175 doi "https://doi.org/10.1116/1.4757132" @default.
• W2040263175 hasPublicationYear "2012" @default.
• W2040263175 type Work @default.
• W2040263175 sameAs 2040263175 @default.
• W2040263175 citedByCount "6" @default.
• W2040263175 countsByYear W20402631752014 @default.
• W2040263175 countsByYear W20402631752016 @default.
• W2040263175 countsByYear W20402631752018 @default.
• W2040263175 countsByYear W20402631752021 @default.
• W2040263175 crossrefType "journal-article" @default.
• W2040263175 hasAuthorship W2040263175A5019430493 @default.
• W2040263175 hasAuthorship W2040263175A5019617764 @default.
• W2040263175 hasAuthorship W2040263175A5027370987 @default.
• W2040263175 hasAuthorship W2040263175A5046711066 @default.
• W2040263175 hasAuthorship W2040263175A5072428776 @default.
• W2040263175 hasAuthorship W2040263175A5073437751 @default.
• W2040263175 hasConcept C119599485 @default.
• W2040263175 hasConcept C127413603 @default.
• W2040263175 hasConcept C133386390 @default.
• W2040263175 hasConcept C16317505 @default.
• W2040263175 hasConcept C165801399 @default.
• W2040263175 hasConcept C171250308 @default.
• W2040263175 hasConcept C19067145 @default.
• W2040263175 hasConcept C191897082 @default.
• W2040263175 hasConcept C192562407 @default.
• W2040263175 hasConcept C22423302 @default.
• W2040263175 hasConcept C2775880870 @default.
• W2040263175 hasConcept C49040817 @default.
• W2040263175 hasConcept C506065880 @default.
• W2040263175 hasConcept C507968137 @default.
• W2040263175 hasConcept C513153333 @default.
• W2040263175 hasConcept C514619126 @default.
• W2040263175 hasConcept C51968632 @default.
• W2040263175 hasConcept C52192207 @default.
• W2040263175 hasConcept C534791751 @default.
• W2040263175 hasConcept C546638069 @default.
• W2040263175 hasConcept C6432897 @default.
• W2040263175 hasConcept C79100374 @default.
• W2040263175 hasConcept C91066073 @default.
• W2040263175 hasConceptScore W2040263175C119599485 @default.
• W2040263175 hasConceptScore W2040263175C127413603 @default.
• W2040263175 hasConceptScore W2040263175C133386390 @default.
• W2040263175 hasConceptScore W2040263175C16317505 @default.
• W2040263175 hasConceptScore W2040263175C165801399 @default.
• W2040263175 hasConceptScore W2040263175C171250308 @default.
• W2040263175 hasConceptScore W2040263175C19067145 @default.
• W2040263175 hasConceptScore W2040263175C191897082 @default.
• W2040263175 hasConceptScore W2040263175C192562407 @default.
• W2040263175 hasConceptScore W2040263175C22423302 @default.
• W2040263175 hasConceptScore W2040263175C2775880870 @default.
• W2040263175 hasConceptScore W2040263175C49040817 @default.
• W2040263175 hasConceptScore W2040263175C506065880 @default.
• W2040263175 hasConceptScore W2040263175C507968137 @default.
• W2040263175 hasConceptScore W2040263175C513153333 @default.
• W2040263175 hasConceptScore W2040263175C514619126 @default.
• W2040263175 hasConceptScore W2040263175C51968632 @default.
• W2040263175 hasConceptScore W2040263175C52192207 @default.
• W2040263175 hasConceptScore W2040263175C534791751 @default.
• W2040263175 hasConceptScore W2040263175C546638069 @default.
• W2040263175 hasConceptScore W2040263175C6432897 @default.
• W2040263175 hasConceptScore W2040263175C79100374 @default.
• W2040263175 hasConceptScore W2040263175C91066073 @default.
• W2040263175 hasIssue "6" @default.
• W2040263175 hasLocation W20402631751 @default.
• W2040263175 hasOpenAccess W2040263175 @default.
• W2040263175 hasPrimaryLocation W20402631751 @default.
• W2040263175 hasRelatedWork W1987543050 @default.
• W2040263175 hasRelatedWork W1994823365 @default.
• W2040263175 hasRelatedWork W2039437343 @default.
• W2040263175 hasRelatedWork W2040263175 @default.
• W2040263175 hasRelatedWork W2055471543 @default.
• W2040263175 hasRelatedWork W2117698662 @default.
• W2040263175 hasRelatedWork W2138552090 @default.

• next