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• W2040278833 abstract "Recent progress in understanding the ion and atom bombarding properties of magnetron sputtering sources is described, and ways of controlling the bombardment using source design, source excitation or system design are outlined. Some recent technological developments in magnetron sputtering are discussed." @default.
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• W2040278833 date "1995-03-01" @default.
• W2040278833 modified "2023-10-18" @default.
• W2040278833 title "Recent advances in sputter deposition" @default.
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• W2040278833 doi "https://doi.org/10.1016/0257-8972(95)80024-7" @default.
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