Matches in SemOpenAlex for { <https://semopenalex.org/work/W2040290434> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2040290434 endingPage "297" @default.
- W2040290434 startingPage "297" @default.
- W2040290434 abstract "We have investigated the existence of ordered structure in buried oxide layers of SOI (silicon on insulator) wafers. Two kinds of SOI wafers, bonded and SIMOX wafers, were examined by x-ray diffraction technique. As the results, the diffraction streaks perpendicular to the interfaces were found at the middle of the reciprocal lattice points of Si for the SIMOX wafer, while no clear diffraction evidence indicating some structural property was observed for the bonded wafer. This means that there exists an ordered structure in the buried oxide layer of SIMOX wafers, having epitaxial relationship with the Si substrate." @default.
- W2040290434 created "2016-06-24" @default.
- W2040290434 creator A5036881002 @default.
- W2040290434 creator A5056128134 @default.
- W2040290434 creator A5065080977 @default.
- W2040290434 creator A5085269462 @default.
- W2040290434 date "1999-01-01" @default.
- W2040290434 modified "2023-09-26" @default.
- W2040290434 title "Ordered Structure in Buried Oxide Layers of SOI Wafers" @default.
- W2040290434 cites W1985294475 @default.
- W2040290434 cites W1999087511 @default.
- W2040290434 doi "https://doi.org/10.7567/jjaps.38s1.297" @default.
- W2040290434 hasPublicationYear "1999" @default.
- W2040290434 type Work @default.
- W2040290434 sameAs 2040290434 @default.
- W2040290434 citedByCount "2" @default.
- W2040290434 crossrefType "journal-article" @default.
- W2040290434 hasAuthorship W2040290434A5036881002 @default.
- W2040290434 hasAuthorship W2040290434A5056128134 @default.
- W2040290434 hasAuthorship W2040290434A5065080977 @default.
- W2040290434 hasAuthorship W2040290434A5085269462 @default.
- W2040290434 hasBestOaLocation W20402904341 @default.
- W2040290434 hasConcept C110738630 @default.
- W2040290434 hasConcept C111368507 @default.
- W2040290434 hasConcept C120665830 @default.
- W2040290434 hasConcept C121332964 @default.
- W2040290434 hasConcept C127313418 @default.
- W2040290434 hasConcept C160671074 @default.
- W2040290434 hasConcept C171250308 @default.
- W2040290434 hasConcept C185592680 @default.
- W2040290434 hasConcept C191897082 @default.
- W2040290434 hasConcept C192562407 @default.
- W2040290434 hasConcept C199631012 @default.
- W2040290434 hasConcept C207114421 @default.
- W2040290434 hasConcept C212702 @default.
- W2040290434 hasConcept C2524010 @default.
- W2040290434 hasConcept C2777289219 @default.
- W2040290434 hasConcept C2779227376 @default.
- W2040290434 hasConcept C2779851234 @default.
- W2040290434 hasConcept C33923547 @default.
- W2040290434 hasConcept C49040817 @default.
- W2040290434 hasConcept C53143962 @default.
- W2040290434 hasConcept C544956773 @default.
- W2040290434 hasConcept C8010536 @default.
- W2040290434 hasConceptScore W2040290434C110738630 @default.
- W2040290434 hasConceptScore W2040290434C111368507 @default.
- W2040290434 hasConceptScore W2040290434C120665830 @default.
- W2040290434 hasConceptScore W2040290434C121332964 @default.
- W2040290434 hasConceptScore W2040290434C127313418 @default.
- W2040290434 hasConceptScore W2040290434C160671074 @default.
- W2040290434 hasConceptScore W2040290434C171250308 @default.
- W2040290434 hasConceptScore W2040290434C185592680 @default.
- W2040290434 hasConceptScore W2040290434C191897082 @default.
- W2040290434 hasConceptScore W2040290434C192562407 @default.
- W2040290434 hasConceptScore W2040290434C199631012 @default.
- W2040290434 hasConceptScore W2040290434C207114421 @default.
- W2040290434 hasConceptScore W2040290434C212702 @default.
- W2040290434 hasConceptScore W2040290434C2524010 @default.
- W2040290434 hasConceptScore W2040290434C2777289219 @default.
- W2040290434 hasConceptScore W2040290434C2779227376 @default.
- W2040290434 hasConceptScore W2040290434C2779851234 @default.
- W2040290434 hasConceptScore W2040290434C33923547 @default.
- W2040290434 hasConceptScore W2040290434C49040817 @default.
- W2040290434 hasConceptScore W2040290434C53143962 @default.
- W2040290434 hasConceptScore W2040290434C544956773 @default.
- W2040290434 hasConceptScore W2040290434C8010536 @default.
- W2040290434 hasIssue "S1" @default.
- W2040290434 hasLocation W20402904341 @default.
- W2040290434 hasOpenAccess W2040290434 @default.
- W2040290434 hasPrimaryLocation W20402904341 @default.
- W2040290434 hasRelatedWork W1787443341 @default.
- W2040290434 hasRelatedWork W1977453585 @default.
- W2040290434 hasRelatedWork W1982635368 @default.
- W2040290434 hasRelatedWork W1985855089 @default.
- W2040290434 hasRelatedWork W2047440913 @default.
- W2040290434 hasRelatedWork W2071741888 @default.
- W2040290434 hasRelatedWork W2080157879 @default.
- W2040290434 hasRelatedWork W2087673424 @default.
- W2040290434 hasRelatedWork W2127916613 @default.
- W2040290434 hasRelatedWork W2901159265 @default.
- W2040290434 hasVolume "38" @default.
- W2040290434 isParatext "false" @default.
- W2040290434 isRetracted "false" @default.
- W2040290434 magId "2040290434" @default.
- W2040290434 workType "article" @default.