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• W2040336578 abstract "Etching of single-domain $mathrm{Si}(001)ensuremath{-}2ifmmodetimeselsetexttimesfi{}1$ by 800-eV ${mathrm{Ar}}^{+}$ ions has been studied using surface-induced optical-anisotropy measurements in the temperature range from 293 to 870 K. At 293 K, the surface area which is distorted by one impinging ion is determined to be $3.9ifmmodetimeselsetexttimesfi{}{10}^{ensuremath{-}14}{mathrm{cm}}^{2},$ and at this temperature no annealing was observed. With increasing temperatures the etch behavior gradually changes from mere roughening to a situation where ion-induced surface damage is restored. At 670 K and ${10}^{11}{mathrm{ions}mathrm{}mathrm{cm}}^{mathrm{ensuremath{-}}2}{mathrm{s}}^{mathrm{ensuremath{-}}1},$ no ion-induced changes in the optical anisotropy could be observed, and hence ${D}_{B}$ step etching occurs. During ion bombardment at higher temperatures we observed the development of protrusions on the surface with facets in the ${11l}$ directions. Protrusions were also found during etching by ${mathrm{O}}_{2}$ at 1020 K, and their development is attributed to pinning at residual contaminations. Formation of protrusions during sample cleaning may be responsible for the large scatter in reported optical-anisotropy data of clean single-domain $mathrm{Si}(001)ensuremath{-}2ifmmodetimeselsetexttimesfi{}1.$ This illustrates the importance of a well-controlled sample preparation procedure." @default.
• W2040336578 created "2016-06-24" @default.
• W2040336578 creator A5018225412 @default.
• W2040336578 creator A5021242912 @default.
• W2040336578 creator A5049775341 @default.
• W2040336578 creator A5086555741 @default.
• W2040336578 date "1997-09-15" @default.
• W2040336578 modified "2023-09-24" @default.
• W2040336578 title "Etching behavior ofSi(001)−2×1studied with optical anisotropy" @default.
• W2040336578 cites W1971355997 @default.
• W2040336578 cites W1971520323 @default.
• W2040336578 cites W2004764114 @default.
• W2040336578 cites W2009547177 @default.
• W2040336578 cites W2018356577 @default.
• W2040336578 cites W2020113996 @default.
• W2040336578 cites W2020636406 @default.
• W2040336578 cites W2026814984 @default.
• W2040336578 cites W2038555244 @default.
• W2040336578 cites W2042728015 @default.
• W2040336578 cites W2050139088 @default.
• W2040336578 cites W2050506342 @default.
• W2040336578 cites W2051943365 @default.
• W2040336578 cites W2061269191 @default.
• W2040336578 cites W2066013639 @default.
• W2040336578 cites W2069204802 @default.
• W2040336578 cites W2071051637 @default.
• W2040336578 cites W2077642361 @default.
• W2040336578 cites W2082858681 @default.
• W2040336578 cites W2083582478 @default.
• W2040336578 cites W2089219595 @default.
• W2040336578 cites W2095084022 @default.
• W2040336578 cites W2132325324 @default.
• W2040336578 cites W2141844603 @default.
• W2040336578 cites W2144965408 @default.
• W2040336578 doi "https://doi.org/10.1103/physrevb.56.7679" @default.
• W2040336578 hasPublicationYear "1997" @default.
• W2040336578 type Work @default.
• W2040336578 sameAs 2040336578 @default.
• W2040336578 citedByCount "3" @default.
• W2040336578 crossrefType "journal-article" @default.
• W2040336578 hasAuthorship W2040336578A5018225412 @default.
• W2040336578 hasAuthorship W2040336578A5021242912 @default.
• W2040336578 hasAuthorship W2040336578A5049775341 @default.
• W2040336578 hasAuthorship W2040336578A5086555741 @default.
• W2040336578 hasConcept C100460472 @default.
• W2040336578 hasConcept C113196181 @default.
• W2040336578 hasConcept C120665830 @default.
• W2040336578 hasConcept C121332964 @default.
• W2040336578 hasConcept C145148216 @default.
• W2040336578 hasConcept C171250308 @default.
• W2040336578 hasConcept C185592680 @default.
• W2040336578 hasConcept C191897082 @default.
• W2040336578 hasConcept C192562407 @default.
• W2040336578 hasConcept C26873012 @default.
• W2040336578 hasConcept C2777855556 @default.
• W2040336578 hasConcept C2779227376 @default.
• W2040336578 hasConcept C2992461572 @default.
• W2040336578 hasConcept C43617362 @default.
• W2040336578 hasConcept C62520636 @default.
• W2040336578 hasConcept C8010536 @default.
• W2040336578 hasConcept C85725439 @default.
• W2040336578 hasConceptScore W2040336578C100460472 @default.
• W2040336578 hasConceptScore W2040336578C113196181 @default.
• W2040336578 hasConceptScore W2040336578C120665830 @default.
• W2040336578 hasConceptScore W2040336578C121332964 @default.
• W2040336578 hasConceptScore W2040336578C145148216 @default.
• W2040336578 hasConceptScore W2040336578C171250308 @default.
• W2040336578 hasConceptScore W2040336578C185592680 @default.
• W2040336578 hasConceptScore W2040336578C191897082 @default.
• W2040336578 hasConceptScore W2040336578C192562407 @default.
• W2040336578 hasConceptScore W2040336578C26873012 @default.
• W2040336578 hasConceptScore W2040336578C2777855556 @default.
• W2040336578 hasConceptScore W2040336578C2779227376 @default.
• W2040336578 hasConceptScore W2040336578C2992461572 @default.
• W2040336578 hasConceptScore W2040336578C43617362 @default.
• W2040336578 hasConceptScore W2040336578C62520636 @default.
• W2040336578 hasConceptScore W2040336578C8010536 @default.
• W2040336578 hasConceptScore W2040336578C85725439 @default.
• W2040336578 hasLocation W20403365781 @default.
• W2040336578 hasOpenAccess W2040336578 @default.
• W2040336578 hasPrimaryLocation W20403365781 @default.
• W2040336578 hasRelatedWork W1966866043 @default.
• W2040336578 hasRelatedWork W1979128992 @default.
• W2040336578 hasRelatedWork W1983253440 @default.
• W2040336578 hasRelatedWork W1993617693 @default.
• W2040336578 hasRelatedWork W2002673307 @default.
• W2040336578 hasRelatedWork W2019103494 @default.
• W2040336578 hasRelatedWork W2024359955 @default.
• W2040336578 hasRelatedWork W2031061489 @default.
• W2040336578 hasRelatedWork W2044917856 @default.
• W2040336578 hasRelatedWork W2058855478 @default.
• W2040336578 hasRelatedWork W2069700862 @default.
• W2040336578 hasRelatedWork W2074795076 @default.
• W2040336578 hasRelatedWork W2075964747 @default.
• W2040336578 hasRelatedWork W2211430283 @default.
• W2040336578 hasRelatedWork W2264951205 @default.
• W2040336578 hasRelatedWork W2738801569 @default.
• W2040336578 hasRelatedWork W2765572682 @default.
• W2040336578 hasRelatedWork W2999694207 @default.
• W2040336578 hasRelatedWork W3047207460 @default.

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