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- W2040338034 abstract "Energy and angular distributions of ions at the substrate electrode are computed with a Monte-Carlo-Simulation, accounting for charge transfer collisions and elastic scattering via differential cross sections. The time dependent electric field the ions react on is calulated with an extended hydrodynamical theory, that is valid for the whole pressure range including those that is relevant for RIE pocessing. The influence of the scattering processes on etch profiles is estimated from the calculated distributions." @default.
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- W2040338034 date "1993-04-01" @default.
- W2040338034 modified "2023-09-25" @default.
- W2040338034 title "Simulation of time depending particle transport during dry etch process" @default.
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- W2040338034 doi "https://doi.org/10.1016/0167-9317(93)90083-h" @default.
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