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- W2040348912 abstract "Electrostatically actuated, 500micrometers diameter, Si surface micromachined 2-axis tilting micromirrors were designed and fabricated in a 2 structural + 1 interconnect layer polysilicon process. The mirrors are capable of large, continuous, controlled, DC tilt in any direction at moderate actuation voltages. The lowest-mode resonance frequency is sufficiently high to decouple from the ambient vibration noise and allow setting times of less than a few milliseconds. The Au- coated reflectors, suspended in gimbal mounts via torsional springs and bearings, are tilted by applying voltage to four electrically independent sets of fixed electrodes on the substrate. The electrodes and the springs are designed to optimize actuation voltages, resonance frequencies and the deflection range. To achieve the range, the mounts are lifted and fixed fifty microns above the substrate surface during the release process by a self-assembly mechanism powered by tailored residual stress in a separate metalization layer. Square arrays with 1 mm pitch containing independently addressable identical 16, 64 and 256 mirrors were fabricated and hermetically packaged. Based on these devices, fully functional, bitrate and wavelength independent, single stage, low insertion loss, single mode fiber optical crossconnect system are built." @default.
- W2040348912 created "2016-06-24" @default.
- W2040348912 creator A5011527356 @default.
- W2040348912 creator A5049688771 @default.
- W2040348912 creator A5056757124 @default.
- W2040348912 creator A5072945758 @default.
- W2040348912 creator A5085207483 @default.
- W2040348912 creator A5091861127 @default.
- W2040348912 date "2000-08-22" @default.
- W2040348912 modified "2023-09-25" @default.
- W2040348912 title "<title>Lucent Microstar micromirror array technology for large optical crossconnects</title>" @default.
- W2040348912 cites W1991709208 @default.
- W2040348912 cites W1992881859 @default.
- W2040348912 cites W2134051550 @default.
- W2040348912 cites W2154999257 @default.
- W2040348912 cites W2156686996 @default.
- W2040348912 doi "https://doi.org/10.1117/12.396503" @default.
- W2040348912 hasPublicationYear "2000" @default.
- W2040348912 type Work @default.
- W2040348912 sameAs 2040348912 @default.
- W2040348912 citedByCount "69" @default.
- W2040348912 countsByYear W20403489122012 @default.
- W2040348912 countsByYear W20403489122014 @default.
- W2040348912 countsByYear W20403489122015 @default.
- W2040348912 countsByYear W20403489122017 @default.
- W2040348912 countsByYear W20403489122019 @default.
- W2040348912 countsByYear W20403489122020 @default.
- W2040348912 countsByYear W20403489122021 @default.
- W2040348912 crossrefType "proceedings-article" @default.
- W2040348912 hasAuthorship W2040348912A5011527356 @default.
- W2040348912 hasAuthorship W2040348912A5049688771 @default.
- W2040348912 hasAuthorship W2040348912A5056757124 @default.
- W2040348912 hasAuthorship W2040348912A5072945758 @default.
- W2040348912 hasAuthorship W2040348912A5085207483 @default.
- W2040348912 hasAuthorship W2040348912A5091861127 @default.
- W2040348912 hasConcept C105487726 @default.
- W2040348912 hasConcept C119599485 @default.
- W2040348912 hasConcept C120665830 @default.
- W2040348912 hasConcept C121332964 @default.
- W2040348912 hasConcept C125750033 @default.
- W2040348912 hasConcept C127413603 @default.
- W2040348912 hasConcept C136525101 @default.
- W2040348912 hasConcept C142724271 @default.
- W2040348912 hasConcept C145667562 @default.
- W2040348912 hasConcept C165801399 @default.
- W2040348912 hasConcept C17525397 @default.
- W2040348912 hasConcept C192562407 @default.
- W2040348912 hasConcept C204787440 @default.
- W2040348912 hasConcept C2781355719 @default.
- W2040348912 hasConcept C49040817 @default.
- W2040348912 hasConcept C62520636 @default.
- W2040348912 hasConcept C71924100 @default.
- W2040348912 hasConcept C90327742 @default.
- W2040348912 hasConceptScore W2040348912C105487726 @default.
- W2040348912 hasConceptScore W2040348912C119599485 @default.
- W2040348912 hasConceptScore W2040348912C120665830 @default.
- W2040348912 hasConceptScore W2040348912C121332964 @default.
- W2040348912 hasConceptScore W2040348912C125750033 @default.
- W2040348912 hasConceptScore W2040348912C127413603 @default.
- W2040348912 hasConceptScore W2040348912C136525101 @default.
- W2040348912 hasConceptScore W2040348912C142724271 @default.
- W2040348912 hasConceptScore W2040348912C145667562 @default.
- W2040348912 hasConceptScore W2040348912C165801399 @default.
- W2040348912 hasConceptScore W2040348912C17525397 @default.
- W2040348912 hasConceptScore W2040348912C192562407 @default.
- W2040348912 hasConceptScore W2040348912C204787440 @default.
- W2040348912 hasConceptScore W2040348912C2781355719 @default.
- W2040348912 hasConceptScore W2040348912C49040817 @default.
- W2040348912 hasConceptScore W2040348912C62520636 @default.
- W2040348912 hasConceptScore W2040348912C71924100 @default.
- W2040348912 hasConceptScore W2040348912C90327742 @default.
- W2040348912 hasLocation W20403489121 @default.
- W2040348912 hasOpenAccess W2040348912 @default.
- W2040348912 hasPrimaryLocation W20403489121 @default.
- W2040348912 hasRelatedWork W1898048807 @default.
- W2040348912 hasRelatedWork W2049024861 @default.
- W2040348912 hasRelatedWork W2070496215 @default.
- W2040348912 hasRelatedWork W2097844347 @default.
- W2040348912 hasRelatedWork W2145728184 @default.
- W2040348912 hasRelatedWork W2243914388 @default.
- W2040348912 hasRelatedWork W2294966578 @default.
- W2040348912 hasRelatedWork W2376267563 @default.
- W2040348912 hasRelatedWork W2390654449 @default.
- W2040348912 hasRelatedWork W2896943785 @default.
- W2040348912 isParatext "false" @default.
- W2040348912 isRetracted "false" @default.
- W2040348912 magId "2040348912" @default.
- W2040348912 workType "article" @default.