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- W2040378764 abstract "Nanoimprint Lithography (NIL) is an emerging alternative lithography technology that can be repeated to print nanometer-scale geometries which have very good uniformity and repeatability. The compliant mechanism is a novel mechanism which has been utilized in many accurate mechanisms and precise instruments because of its obvious advantages such as easy assembly, zero friction, zero lubrication, low cost, monolithic manufacturing and reduced weight, etc. This paper mainly introduces the application of compliant mechanisms in NIL and analysis and design of several novel compliant mechanisms." @default.
- W2040378764 created "2016-06-24" @default.
- W2040378764 creator A5008388493 @default.
- W2040378764 creator A5016554797 @default.
- W2040378764 creator A5026365889 @default.
- W2040378764 creator A5040338873 @default.
- W2040378764 creator A5091105534 @default.
- W2040378764 date "2011-06-01" @default.
- W2040378764 modified "2023-09-25" @default.
- W2040378764 title "Design of compliant parallel mechanism for Nanoimprint Lithography" @default.
- W2040378764 cites W1844474251 @default.
- W2040378764 cites W1964757843 @default.
- W2040378764 cites W1973312921 @default.
- W2040378764 cites W1976166713 @default.
- W2040378764 cites W1979016889 @default.
- W2040378764 cites W2046928075 @default.
- W2040378764 cites W2053354202 @default.
- W2040378764 cites W2066844661 @default.
- W2040378764 cites W2091759666 @default.
- W2040378764 cites W2124945831 @default.
- W2040378764 cites W2127251785 @default.
- W2040378764 cites W2152035443 @default.
- W2040378764 cites W4240961869 @default.
- W2040378764 cites W2106757559 @default.
- W2040378764 doi "https://doi.org/10.1109/iciea.2011.5975579" @default.
- W2040378764 hasPublicationYear "2011" @default.
- W2040378764 type Work @default.
- W2040378764 sameAs 2040378764 @default.
- W2040378764 citedByCount "4" @default.
- W2040378764 countsByYear W20403787642012 @default.
- W2040378764 countsByYear W20403787642014 @default.
- W2040378764 countsByYear W20403787642015 @default.
- W2040378764 countsByYear W20403787642022 @default.
- W2040378764 crossrefType "proceedings-article" @default.
- W2040378764 hasAuthorship W2040378764A5008388493 @default.
- W2040378764 hasAuthorship W2040378764A5016554797 @default.
- W2040378764 hasAuthorship W2040378764A5026365889 @default.
- W2040378764 hasAuthorship W2040378764A5040338873 @default.
- W2040378764 hasAuthorship W2040378764A5091105534 @default.
- W2040378764 hasConcept C111472728 @default.
- W2040378764 hasConcept C127413603 @default.
- W2040378764 hasConcept C135628077 @default.
- W2040378764 hasConcept C136525101 @default.
- W2040378764 hasConcept C138885662 @default.
- W2040378764 hasConcept C142724271 @default.
- W2040378764 hasConcept C159985019 @default.
- W2040378764 hasConcept C171250308 @default.
- W2040378764 hasConcept C184608416 @default.
- W2040378764 hasConcept C192562407 @default.
- W2040378764 hasConcept C204223013 @default.
- W2040378764 hasConcept C204787440 @default.
- W2040378764 hasConcept C2777046567 @default.
- W2040378764 hasConcept C41008148 @default.
- W2040378764 hasConcept C49040817 @default.
- W2040378764 hasConcept C66938386 @default.
- W2040378764 hasConcept C71924100 @default.
- W2040378764 hasConcept C79772673 @default.
- W2040378764 hasConcept C89611455 @default.
- W2040378764 hasConceptScore W2040378764C111472728 @default.
- W2040378764 hasConceptScore W2040378764C127413603 @default.
- W2040378764 hasConceptScore W2040378764C135628077 @default.
- W2040378764 hasConceptScore W2040378764C136525101 @default.
- W2040378764 hasConceptScore W2040378764C138885662 @default.
- W2040378764 hasConceptScore W2040378764C142724271 @default.
- W2040378764 hasConceptScore W2040378764C159985019 @default.
- W2040378764 hasConceptScore W2040378764C171250308 @default.
- W2040378764 hasConceptScore W2040378764C184608416 @default.
- W2040378764 hasConceptScore W2040378764C192562407 @default.
- W2040378764 hasConceptScore W2040378764C204223013 @default.
- W2040378764 hasConceptScore W2040378764C204787440 @default.
- W2040378764 hasConceptScore W2040378764C2777046567 @default.
- W2040378764 hasConceptScore W2040378764C41008148 @default.
- W2040378764 hasConceptScore W2040378764C49040817 @default.
- W2040378764 hasConceptScore W2040378764C66938386 @default.
- W2040378764 hasConceptScore W2040378764C71924100 @default.
- W2040378764 hasConceptScore W2040378764C79772673 @default.
- W2040378764 hasConceptScore W2040378764C89611455 @default.
- W2040378764 hasLocation W20403787641 @default.
- W2040378764 hasOpenAccess W2040378764 @default.
- W2040378764 hasPrimaryLocation W20403787641 @default.
- W2040378764 hasRelatedWork W1538953426 @default.
- W2040378764 hasRelatedWork W1977236243 @default.
- W2040378764 hasRelatedWork W2040378764 @default.
- W2040378764 hasRelatedWork W2067116090 @default.
- W2040378764 hasRelatedWork W2082879166 @default.
- W2040378764 hasRelatedWork W2321866466 @default.
- W2040378764 hasRelatedWork W2500364019 @default.
- W2040378764 hasRelatedWork W2742452764 @default.
- W2040378764 hasRelatedWork W2968272078 @default.
- W2040378764 hasRelatedWork W573585812 @default.
- W2040378764 isParatext "false" @default.
- W2040378764 isRetracted "false" @default.
- W2040378764 magId "2040378764" @default.
- W2040378764 workType "article" @default.