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- W2040382968 abstract "Site-controlled Ga droplet formation on CaF 2 film by means of focused electron beam exposure was applied to the fabrication of a two-dimensional ordered nanostructure array. The proximity effect of this method was investigated as a function of the period of the dot array and the electron dose per dot site. A two-dimensional Ga droplet array, in which the diameter of each droplet was approximately 20 nm, with a 100 nm period was obtained. The minimum period which can control the formation site was found to be related to the exposed region at the As/CaF 2 interface, and may be reduced by improving the process conditions such as by using a small beam spot and a thinner As film." @default.
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- W2040382968 date "1996-12-01" @default.
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- W2040382968 title "Site Control of Ga Droplet Array on CaF<sub> 2</sub> by Surface Modification Using a Focused Electron Beam" @default.
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- W2040382968 doi "https://doi.org/10.1143/jjap.35.6689" @default.
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