Matches in SemOpenAlex for { <https://semopenalex.org/work/W2040479284> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2040479284 abstract "On the crystalline quality of Ge layers heteroepitaxially grown on Si substrates by the MBE two-step procedure without the intermediate annealing process, the effect of growth temperature and thickness of the first layer was investigated between 135 and 600 °C, and for 20 and 200 nm, respectively, by means of RBS-channeling and cross-sectional TEM methods. The second layer growth temperature was fixed at 600 °C. It was found that, in reducing the total amount of lattice disorder, the two-step procedure has an advantage over the direct deposition, and 200 nm is more favorable than 20 nm as the first layer thickness. The Ge layer of the best quality was obtained when the first layer of 200nm was grown at 400–500 °C, and subsequently the second layer was grown at 600 °C. The PIXE-channeling method was effectively applied to locate Ga atoms doped in the Ge layer grown by the two-step procedure at 300 and 550 °C. Approximately 40% of Ga atoms were located at substitutional sites and the rest at random sites, probably in the form of precipitates." @default.
- W2040479284 created "2016-06-24" @default.
- W2040479284 creator A5018854019 @default.
- W2040479284 creator A5035617850 @default.
- W2040479284 creator A5057502083 @default.
- W2040479284 creator A5070603843 @default.
- W2040479284 date "1992-01-01" @default.
- W2040479284 modified "2023-10-02" @default.
- W2040479284 title "CHANNELING ANALYSIS OF Ge EPITAXIAL LAYER ON Si SUBSTRATE AND DOPED Ga ATOMS BY USING RBS AND PIXE METHODS" @default.
- W2040479284 doi "https://doi.org/10.1142/s0129083592000130" @default.
- W2040479284 hasPublicationYear "1992" @default.
- W2040479284 type Work @default.
- W2040479284 sameAs 2040479284 @default.
- W2040479284 citedByCount "0" @default.
- W2040479284 crossrefType "journal-article" @default.
- W2040479284 hasAuthorship W2040479284A5018854019 @default.
- W2040479284 hasAuthorship W2040479284A5035617850 @default.
- W2040479284 hasAuthorship W2040479284A5057502083 @default.
- W2040479284 hasAuthorship W2040479284A5070603843 @default.
- W2040479284 hasConcept C110738630 @default.
- W2040479284 hasConcept C111368507 @default.
- W2040479284 hasConcept C113196181 @default.
- W2040479284 hasConcept C127313418 @default.
- W2040479284 hasConcept C171250308 @default.
- W2040479284 hasConcept C185592680 @default.
- W2040479284 hasConcept C191897082 @default.
- W2040479284 hasConcept C192562407 @default.
- W2040479284 hasConcept C2777289219 @default.
- W2040479284 hasConcept C2777855556 @default.
- W2040479284 hasConcept C2779227376 @default.
- W2040479284 hasConcept C43617362 @default.
- W2040479284 hasConcept C49040817 @default.
- W2040479284 hasConcept C544956773 @default.
- W2040479284 hasConcept C550623735 @default.
- W2040479284 hasConcept C57863236 @default.
- W2040479284 hasConcept C8010536 @default.
- W2040479284 hasConceptScore W2040479284C110738630 @default.
- W2040479284 hasConceptScore W2040479284C111368507 @default.
- W2040479284 hasConceptScore W2040479284C113196181 @default.
- W2040479284 hasConceptScore W2040479284C127313418 @default.
- W2040479284 hasConceptScore W2040479284C171250308 @default.
- W2040479284 hasConceptScore W2040479284C185592680 @default.
- W2040479284 hasConceptScore W2040479284C191897082 @default.
- W2040479284 hasConceptScore W2040479284C192562407 @default.
- W2040479284 hasConceptScore W2040479284C2777289219 @default.
- W2040479284 hasConceptScore W2040479284C2777855556 @default.
- W2040479284 hasConceptScore W2040479284C2779227376 @default.
- W2040479284 hasConceptScore W2040479284C43617362 @default.
- W2040479284 hasConceptScore W2040479284C49040817 @default.
- W2040479284 hasConceptScore W2040479284C544956773 @default.
- W2040479284 hasConceptScore W2040479284C550623735 @default.
- W2040479284 hasConceptScore W2040479284C57863236 @default.
- W2040479284 hasConceptScore W2040479284C8010536 @default.
- W2040479284 hasLocation W20404792841 @default.
- W2040479284 hasOpenAccess W2040479284 @default.
- W2040479284 hasPrimaryLocation W20404792841 @default.
- W2040479284 hasRelatedWork W1480947465 @default.
- W2040479284 hasRelatedWork W1983885110 @default.
- W2040479284 hasRelatedWork W2026986459 @default.
- W2040479284 hasRelatedWork W2034735702 @default.
- W2040479284 hasRelatedWork W2036608677 @default.
- W2040479284 hasRelatedWork W2039583404 @default.
- W2040479284 hasRelatedWork W2060257896 @default.
- W2040479284 hasRelatedWork W2068082680 @default.
- W2040479284 hasRelatedWork W2073780862 @default.
- W2040479284 hasRelatedWork W2074024546 @default.
- W2040479284 hasRelatedWork W2083725571 @default.
- W2040479284 hasRelatedWork W2105707138 @default.
- W2040479284 hasRelatedWork W2316948680 @default.
- W2040479284 hasRelatedWork W2322431791 @default.
- W2040479284 hasRelatedWork W2330481307 @default.
- W2040479284 hasRelatedWork W2384070035 @default.
- W2040479284 hasRelatedWork W2490412701 @default.
- W2040479284 hasRelatedWork W2739344023 @default.
- W2040479284 hasRelatedWork W3007801143 @default.
- W2040479284 hasRelatedWork W2153298634 @default.
- W2040479284 isParatext "false" @default.
- W2040479284 isRetracted "false" @default.
- W2040479284 magId "2040479284" @default.
- W2040479284 workType "article" @default.