Matches in SemOpenAlex for { <https://semopenalex.org/work/W2040555550> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2040555550 abstract "We report optical devices based on monolithic integration of multiple nano-structured optical functional layers. Ultraviolet (UV)-nanoimprint lithography along with thin-film deposition, high aspect-ratio reactive ion etching (RIE) and trench-filling technologies were used in fabrication and integration of individual nano-structured optical functional layers. Structures with sub-50 nm linewidth were required in order to achieve good optical performance in the near-UV and visible wavelengths. The ability to integrate multiple nanostructure-based optical layers opens a path for novel integrated optical devices, as well as a new strategy for driving both miniaturization and cost." @default.
- W2040555550 created "2016-06-24" @default.
- W2040555550 creator A5010738468 @default.
- W2040555550 creator A5032764121 @default.
- W2040555550 creator A5036069781 @default.
- W2040555550 creator A5042177387 @default.
- W2040555550 creator A5051116498 @default.
- W2040555550 creator A5056674934 @default.
- W2040555550 creator A5060470951 @default.
- W2040555550 date "2006-02-09" @default.
- W2040555550 modified "2023-09-27" @default.
- W2040555550 title "Multilayer integrated nano-optical devices" @default.
- W2040555550 doi "https://doi.org/10.1117/12.646272" @default.
- W2040555550 hasPublicationYear "2006" @default.
- W2040555550 type Work @default.
- W2040555550 sameAs 2040555550 @default.
- W2040555550 citedByCount "0" @default.
- W2040555550 crossrefType "proceedings-article" @default.
- W2040555550 hasAuthorship W2040555550A5010738468 @default.
- W2040555550 hasAuthorship W2040555550A5032764121 @default.
- W2040555550 hasAuthorship W2040555550A5036069781 @default.
- W2040555550 hasAuthorship W2040555550A5042177387 @default.
- W2040555550 hasAuthorship W2040555550A5051116498 @default.
- W2040555550 hasAuthorship W2040555550A5056674934 @default.
- W2040555550 hasAuthorship W2040555550A5060470951 @default.
- W2040555550 hasConcept C100460472 @default.
- W2040555550 hasConcept C105487726 @default.
- W2040555550 hasConcept C120665830 @default.
- W2040555550 hasConcept C121332964 @default.
- W2040555550 hasConcept C1291036 @default.
- W2040555550 hasConcept C130472188 @default.
- W2040555550 hasConcept C136525101 @default.
- W2040555550 hasConcept C142181693 @default.
- W2040555550 hasConcept C142724271 @default.
- W2040555550 hasConcept C155310634 @default.
- W2040555550 hasConcept C159985019 @default.
- W2040555550 hasConcept C171250308 @default.
- W2040555550 hasConcept C192562407 @default.
- W2040555550 hasConcept C204223013 @default.
- W2040555550 hasConcept C204787440 @default.
- W2040555550 hasConcept C20788544 @default.
- W2040555550 hasConcept C27289702 @default.
- W2040555550 hasConcept C2777046567 @default.
- W2040555550 hasConcept C2779227376 @default.
- W2040555550 hasConcept C2780357685 @default.
- W2040555550 hasConcept C49040817 @default.
- W2040555550 hasConcept C520434653 @default.
- W2040555550 hasConcept C57528182 @default.
- W2040555550 hasConcept C71924100 @default.
- W2040555550 hasConceptScore W2040555550C100460472 @default.
- W2040555550 hasConceptScore W2040555550C105487726 @default.
- W2040555550 hasConceptScore W2040555550C120665830 @default.
- W2040555550 hasConceptScore W2040555550C121332964 @default.
- W2040555550 hasConceptScore W2040555550C1291036 @default.
- W2040555550 hasConceptScore W2040555550C130472188 @default.
- W2040555550 hasConceptScore W2040555550C136525101 @default.
- W2040555550 hasConceptScore W2040555550C142181693 @default.
- W2040555550 hasConceptScore W2040555550C142724271 @default.
- W2040555550 hasConceptScore W2040555550C155310634 @default.
- W2040555550 hasConceptScore W2040555550C159985019 @default.
- W2040555550 hasConceptScore W2040555550C171250308 @default.
- W2040555550 hasConceptScore W2040555550C192562407 @default.
- W2040555550 hasConceptScore W2040555550C204223013 @default.
- W2040555550 hasConceptScore W2040555550C204787440 @default.
- W2040555550 hasConceptScore W2040555550C20788544 @default.
- W2040555550 hasConceptScore W2040555550C27289702 @default.
- W2040555550 hasConceptScore W2040555550C2777046567 @default.
- W2040555550 hasConceptScore W2040555550C2779227376 @default.
- W2040555550 hasConceptScore W2040555550C2780357685 @default.
- W2040555550 hasConceptScore W2040555550C49040817 @default.
- W2040555550 hasConceptScore W2040555550C520434653 @default.
- W2040555550 hasConceptScore W2040555550C57528182 @default.
- W2040555550 hasConceptScore W2040555550C71924100 @default.
- W2040555550 hasLocation W20405555501 @default.
- W2040555550 hasOpenAccess W2040555550 @default.
- W2040555550 hasPrimaryLocation W20405555501 @default.
- W2040555550 hasRelatedWork W1538884143 @default.
- W2040555550 hasRelatedWork W1966895858 @default.
- W2040555550 hasRelatedWork W1995646698 @default.
- W2040555550 hasRelatedWork W2003531181 @default.
- W2040555550 hasRelatedWork W2009476417 @default.
- W2040555550 hasRelatedWork W2031175500 @default.
- W2040555550 hasRelatedWork W2071317332 @default.
- W2040555550 hasRelatedWork W2121655635 @default.
- W2040555550 hasRelatedWork W2612767608 @default.
- W2040555550 hasRelatedWork W2951581608 @default.
- W2040555550 isParatext "false" @default.
- W2040555550 isRetracted "false" @default.
- W2040555550 magId "2040555550" @default.
- W2040555550 workType "article" @default.