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- W2040576440 abstract "The AuGeNi metallization scheme is widely used for alloyed contacts to GaAs. We have studied the interaction of these three elements upon heat treatment using an inert substrate. Our investigations showed that Ni acts as a sink for Ge in that the Ge diffuses out of the Au, with which it is usually coevaporated, into the Ni layer where it forms stable compounds. Apart from a small amount of Au diffusion into the Ni, there is no interaction between these two elements. We have also found that the ratio of the amount of evaporated Ge to that of Ni is important if uniform layers are anticipated." @default.
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- W2040576440 date "1977-05-01" @default.
- W2040576440 modified "2023-10-17" @default.
- W2040576440 title "Investigation of the AuGeNi system used for alloyed contacts to GaAs" @default.
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- W2040576440 doi "https://doi.org/10.1016/0038-1101(77)90136-8" @default.
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