Matches in SemOpenAlex for { <https://semopenalex.org/work/W2040691170> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2040691170 abstract "To meet the challenges in dimensional metrology as the minimum feature size in semiconductor devices approaches sub-35 nm length scales, we have been developing a nondestructive method using x rays termed critical dimension small angle x-ray scattering (SAXS). Its capacity to quantify the dimension of linewidth, pitch, line height, and sidewall angle of line gratings has been demonstrated. In this work, we have further extended its capabilities to quantify the correlated line-edge roughness (LER) and linewidth roughness (LWR). Model line grating patterns with controlled LER and LWR were prepared and measured using x ray, their results were analyzed with model calculations. The magnitude of LER/LWR deduced from x-ray results compares favorably with the scanning electron microscopy results obtained from the same samples. An apparent Debye–Waller factor, which can be deduced from the SAXS data without any detailed model-based calculations, is found to be a convenient parameter to quantify the amplitude of LER/LWR." @default.
- W2040691170 created "2016-06-24" @default.
- W2040691170 creator A5000716296 @default.
- W2040691170 creator A5011915690 @default.
- W2040691170 creator A5021428482 @default.
- W2040691170 creator A5039292363 @default.
- W2040691170 creator A5053593878 @default.
- W2040691170 creator A5056710923 @default.
- W2040691170 creator A5068844363 @default.
- W2040691170 creator A5074113258 @default.
- W2040691170 creator A5079225210 @default.
- W2040691170 date "2007-07-15" @default.
- W2040691170 modified "2023-09-29" @default.
- W2040691170 title "Characterization of correlated line edge roughness of nanoscale line gratings using small angle x-ray scattering" @default.
- W2040691170 cites W1971044461 @default.
- W2040691170 cites W1975655673 @default.
- W2040691170 cites W1976020003 @default.
- W2040691170 cites W2049719810 @default.
- W2040691170 cites W2053733550 @default.
- W2040691170 cites W2068847642 @default.
- W2040691170 cites W2133130083 @default.
- W2040691170 cites W4248519644 @default.
- W2040691170 doi "https://doi.org/10.1063/1.2753588" @default.
- W2040691170 hasPublicationYear "2007" @default.
- W2040691170 type Work @default.
- W2040691170 sameAs 2040691170 @default.
- W2040691170 citedByCount "45" @default.
- W2040691170 countsByYear W20406911702012 @default.
- W2040691170 countsByYear W20406911702013 @default.
- W2040691170 countsByYear W20406911702014 @default.
- W2040691170 countsByYear W20406911702015 @default.
- W2040691170 countsByYear W20406911702016 @default.
- W2040691170 countsByYear W20406911702017 @default.
- W2040691170 countsByYear W20406911702018 @default.
- W2040691170 countsByYear W20406911702019 @default.
- W2040691170 countsByYear W20406911702020 @default.
- W2040691170 countsByYear W20406911702021 @default.
- W2040691170 countsByYear W20406911702022 @default.
- W2040691170 countsByYear W20406911702023 @default.
- W2040691170 crossrefType "journal-article" @default.
- W2040691170 hasAuthorship W2040691170A5000716296 @default.
- W2040691170 hasAuthorship W2040691170A5011915690 @default.
- W2040691170 hasAuthorship W2040691170A5021428482 @default.
- W2040691170 hasAuthorship W2040691170A5039292363 @default.
- W2040691170 hasAuthorship W2040691170A5053593878 @default.
- W2040691170 hasAuthorship W2040691170A5056710923 @default.
- W2040691170 hasAuthorship W2040691170A5068844363 @default.
- W2040691170 hasAuthorship W2040691170A5074113258 @default.
- W2040691170 hasAuthorship W2040691170A5079225210 @default.
- W2040691170 hasConcept C107365816 @default.
- W2040691170 hasConcept C112416005 @default.
- W2040691170 hasConcept C120665830 @default.
- W2040691170 hasConcept C121332964 @default.
- W2040691170 hasConcept C131888329 @default.
- W2040691170 hasConcept C142181693 @default.
- W2040691170 hasConcept C159985019 @default.
- W2040691170 hasConcept C191486275 @default.
- W2040691170 hasConcept C192562407 @default.
- W2040691170 hasConcept C195766429 @default.
- W2040691170 hasConcept C198352243 @default.
- W2040691170 hasConcept C2524010 @default.
- W2040691170 hasConcept C2777813233 @default.
- W2040691170 hasConcept C33923547 @default.
- W2040691170 hasConcept C520434653 @default.
- W2040691170 hasConcept C71039073 @default.
- W2040691170 hasConceptScore W2040691170C107365816 @default.
- W2040691170 hasConceptScore W2040691170C112416005 @default.
- W2040691170 hasConceptScore W2040691170C120665830 @default.
- W2040691170 hasConceptScore W2040691170C121332964 @default.
- W2040691170 hasConceptScore W2040691170C131888329 @default.
- W2040691170 hasConceptScore W2040691170C142181693 @default.
- W2040691170 hasConceptScore W2040691170C159985019 @default.
- W2040691170 hasConceptScore W2040691170C191486275 @default.
- W2040691170 hasConceptScore W2040691170C192562407 @default.
- W2040691170 hasConceptScore W2040691170C195766429 @default.
- W2040691170 hasConceptScore W2040691170C198352243 @default.
- W2040691170 hasConceptScore W2040691170C2524010 @default.
- W2040691170 hasConceptScore W2040691170C2777813233 @default.
- W2040691170 hasConceptScore W2040691170C33923547 @default.
- W2040691170 hasConceptScore W2040691170C520434653 @default.
- W2040691170 hasConceptScore W2040691170C71039073 @default.
- W2040691170 hasIssue "2" @default.
- W2040691170 hasLocation W20406911701 @default.
- W2040691170 hasOpenAccess W2040691170 @default.
- W2040691170 hasPrimaryLocation W20406911701 @default.
- W2040691170 hasRelatedWork W1567457992 @default.
- W2040691170 hasRelatedWork W1966056991 @default.
- W2040691170 hasRelatedWork W2062432918 @default.
- W2040691170 hasRelatedWork W2063972243 @default.
- W2040691170 hasRelatedWork W2077736096 @default.
- W2040691170 hasRelatedWork W2083552051 @default.
- W2040691170 hasRelatedWork W2088908419 @default.
- W2040691170 hasRelatedWork W2147190950 @default.
- W2040691170 hasRelatedWork W2167443011 @default.
- W2040691170 hasRelatedWork W2301160413 @default.
- W2040691170 hasVolume "102" @default.
- W2040691170 isParatext "false" @default.
- W2040691170 isRetracted "false" @default.
- W2040691170 magId "2040691170" @default.
- W2040691170 workType "article" @default.