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- W2040693648 abstract "A confocal color laser microscope which utilizes a three color laser light source (Red: He-Ne, Green: Ar, Blue: Ar) has been developed and is finding useful applications in the semiconductor field. The color laser microscope, when compared to a conventional microscope, offers superior color separation, higher resolution, and sharper contrast. Recently some new functions including a Focus Scan Memory, a Surface Profile Measurement System, a Critical Dimension Measurement system (CD) and an Optical Beam Induced Current Function (OBIC) have been developed for the color laser microscope. This paper will discuss these new features." @default.
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- W2040693648 date "1988-01-01" @default.
- W2040693648 modified "2023-09-23" @default.
- W2040693648 title "Scanning Color Laser Microscope" @default.
- W2040693648 doi "https://doi.org/10.1117/12.968387" @default.
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