Matches in SemOpenAlex for { <https://semopenalex.org/work/W2040731208> ?p ?o ?g. }
- W2040731208 endingPage "195501" @default.
- W2040731208 startingPage "195501" @default.
- W2040731208 abstract "Zirconium oxynitride thin films were deposited by dc reactive magnetron sputtering. A zirconium metallic target was sputtered in an Ar + N2 + O2 atmosphere. Argon and nitrogen flow rates were maintained constant whereas oxygen was pulsed during the deposition, implementing the reactive gas pulsing process (RGPP). A constant pulsing period T = 3?s was used following an exponential periodic signal versus time. The introduction time of oxygen was systematically changed from 17% to 83% of the period. The RGPP allowed the synthesis of ZrOxNy films with tuneable metalloid concentrations adjusting the introduction time of the oxygen. Composition and structural variations associated with mechanical, optical and electrical properties exhibited a smooth transition, from metallic-like characteristics, typical of the fcc-ZrN phase, to semi-conducting behaviour corresponding to a mixture of orthorhombic-Zr3N4(O) and ?-Zr2ON2 crystalline phases." @default.
- W2040731208 created "2016-06-24" @default.
- W2040731208 creator A5004225015 @default.
- W2040731208 creator A5027592247 @default.
- W2040731208 creator A5058749114 @default.
- W2040731208 creator A5066677047 @default.
- W2040731208 creator A5075725880 @default.
- W2040731208 creator A5075804824 @default.
- W2040731208 date "2009-09-18" @default.
- W2040731208 modified "2023-10-14" @default.
- W2040731208 title "ZrO<sub><i>x</i></sub>N<sub><i>y</i></sub>decorative thin films prepared by the reactive gas pulsing process" @default.
- W2040731208 cites W111206922 @default.
- W2040731208 cites W1963518985 @default.
- W2040731208 cites W1973142384 @default.
- W2040731208 cites W1973894514 @default.
- W2040731208 cites W1975464092 @default.
- W2040731208 cites W1978644763 @default.
- W2040731208 cites W1980148802 @default.
- W2040731208 cites W1985542001 @default.
- W2040731208 cites W1991474849 @default.
- W2040731208 cites W1992987613 @default.
- W2040731208 cites W1993363411 @default.
- W2040731208 cites W1995873666 @default.
- W2040731208 cites W2012318497 @default.
- W2040731208 cites W2014448808 @default.
- W2040731208 cites W2015281835 @default.
- W2040731208 cites W2016320253 @default.
- W2040731208 cites W2017048033 @default.
- W2040731208 cites W2033716477 @default.
- W2040731208 cites W2034433960 @default.
- W2040731208 cites W2035711282 @default.
- W2040731208 cites W2040320087 @default.
- W2040731208 cites W2040870129 @default.
- W2040731208 cites W2043045331 @default.
- W2040731208 cites W2051546553 @default.
- W2040731208 cites W2058776344 @default.
- W2040731208 cites W2073819897 @default.
- W2040731208 cites W2082701777 @default.
- W2040731208 cites W2082715671 @default.
- W2040731208 cites W2084138038 @default.
- W2040731208 cites W2085864487 @default.
- W2040731208 cites W2087545241 @default.
- W2040731208 cites W2089799548 @default.
- W2040731208 cites W2097650352 @default.
- W2040731208 cites W2111542492 @default.
- W2040731208 cites W2127792513 @default.
- W2040731208 cites W2128114968 @default.
- W2040731208 cites W2152582037 @default.
- W2040731208 cites W2164705947 @default.
- W2040731208 cites W2077047716 @default.
- W2040731208 doi "https://doi.org/10.1088/0022-3727/42/19/195501" @default.
- W2040731208 hasPublicationYear "2009" @default.
- W2040731208 type Work @default.
- W2040731208 sameAs 2040731208 @default.
- W2040731208 citedByCount "24" @default.
- W2040731208 countsByYear W20407312082012 @default.
- W2040731208 countsByYear W20407312082013 @default.
- W2040731208 countsByYear W20407312082014 @default.
- W2040731208 countsByYear W20407312082015 @default.
- W2040731208 countsByYear W20407312082016 @default.
- W2040731208 countsByYear W20407312082017 @default.
- W2040731208 countsByYear W20407312082018 @default.
- W2040731208 countsByYear W20407312082020 @default.
- W2040731208 countsByYear W20407312082021 @default.
- W2040731208 countsByYear W20407312082023 @default.
- W2040731208 crossrefType "journal-article" @default.
- W2040731208 hasAuthorship W2040731208A5004225015 @default.
- W2040731208 hasAuthorship W2040731208A5027592247 @default.
- W2040731208 hasAuthorship W2040731208A5058749114 @default.
- W2040731208 hasAuthorship W2040731208A5066677047 @default.
- W2040731208 hasAuthorship W2040731208A5075725880 @default.
- W2040731208 hasAuthorship W2040731208A5075804824 @default.
- W2040731208 hasBestOaLocation W20407312084 @default.
- W2040731208 hasConcept C113196181 @default.
- W2040731208 hasConcept C171250308 @default.
- W2040731208 hasConcept C185592680 @default.
- W2040731208 hasConcept C19067145 @default.
- W2040731208 hasConcept C192562407 @default.
- W2040731208 hasConcept C43617362 @default.
- W2040731208 hasConceptScore W2040731208C113196181 @default.
- W2040731208 hasConceptScore W2040731208C171250308 @default.
- W2040731208 hasConceptScore W2040731208C185592680 @default.
- W2040731208 hasConceptScore W2040731208C19067145 @default.
- W2040731208 hasConceptScore W2040731208C192562407 @default.
- W2040731208 hasConceptScore W2040731208C43617362 @default.
- W2040731208 hasIssue "19" @default.
- W2040731208 hasLocation W20407312081 @default.
- W2040731208 hasLocation W20407312082 @default.
- W2040731208 hasLocation W20407312083 @default.
- W2040731208 hasLocation W20407312084 @default.
- W2040731208 hasOpenAccess W2040731208 @default.
- W2040731208 hasPrimaryLocation W20407312081 @default.
- W2040731208 hasRelatedWork W1968965277 @default.
- W2040731208 hasRelatedWork W1969330179 @default.
- W2040731208 hasRelatedWork W2005078522 @default.
- W2040731208 hasRelatedWork W2030929446 @default.
- W2040731208 hasRelatedWork W2067393306 @default.
- W2040731208 hasRelatedWork W2076280938 @default.