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- W2040774448 abstract "A WSiN cap can improve the surface morphology of Ti/Al Ohmic contact to n-GaN significantly. This is because it is a conductive diffusion barrier which can help to suppress the decomposition of GaN. With WSiN cap, the edge is much sharper. However, the WSiN film may pick up Ar during the WSiN sputtering process, resulting in some surface morphology problem. This can be solved by lowering the Ar flow rate during sputtering. Auger electron spectroscopy results show that our best WSiN cap has a chemical composition of W0.62Si0.14N0.34. (© 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
- W2040774448 created "2016-06-24" @default.
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- W2040774448 date "2005-04-11" @default.
- W2040774448 modified "2023-09-30" @default.
- W2040774448 title "WSiN cap for Ohmic contacts to n-GaN with better morphology" @default.
- W2040774448 doi "https://doi.org/10.1002/pssc.200461323" @default.
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