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- W2040775557 abstract "The vapour pressure of two metal organic precursors, Y(thd)3 [CAS RN: 15632-39-0] and Zr(thd)4 [CAS RN: 18865-74-2] (thd=2,2,6,6-tetramethylheptane-3,5-dionate), used for metal organic chemical vapour deposition of high-temperature superconductor layers, was measured by a static method in the technologically important temperature range from 395 to 465 K. The experimental data were fitted by simple two-parameter equation and represent updated values of the present day high-purity materials providing comparison with the previously published data. Heat capacities in the temperature range from 308 to 565 K are also reported." @default.
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- W2040775557 date "2004-03-01" @default.
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- W2040775557 title "Vapour pressure and heat capacities of metal organic precursors, Y(thd)3 and Zr(thd)4" @default.
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- W2040775557 doi "https://doi.org/10.1016/j.jcrysgro.2003.12.016" @default.
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