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- W2040781004 abstract "This paper presents a system to measure three-dimensional profile of a surface, based on the principle of scanning white light interferometry. It adopts a basic structure of Michelson interferometer and semiautomatic fast focus-adjusting mechanism. Through increasing the sampling frequency and applying the feature extracting algorithm, the precision and efficiency of measurement can be increased together." @default.
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- W2040781004 date "1999-10-25" @default.
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- W2040781004 title "<title>Noncontact high-precision surface 3D profiler</title>" @default.
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- W2040781004 doi "https://doi.org/10.1117/12.366700" @default.
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