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- W2040783071 abstract "The removal of photoresist and etch residues from an Interlayer Dielectric sandwich incorporating a FOX (flowable oxide) low-k dielectric polymer can be successfully achieved by implementing a process using H2/N2 forming gas plasma in conjunction with Posistrip®EKC®LE. This cleaning procedure allows W filling to be carried out without delamination and via poisoning." @default.
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- W2040783071 date "1998-03-01" @default.
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- W2040783071 title "Post etch cleaning of low-k dielectric materials for advanced interconnects: Characterization and process optimization" @default.
- W2040783071 doi "https://doi.org/10.1016/s0167-9317(98)00096-3" @default.
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