Matches in SemOpenAlex for { <https://semopenalex.org/work/W2040802309> ?p ?o ?g. }
- W2040802309 abstract "Abstract Tungsten as an absorber for X-Ray masks presents the advantage of easy patterning by reactive ion etching for submicron features, but often suffers of high intrisic stresses. We have thus investigated the variations of the W sputtered films stresses versus deposition parameters in correlation with the phase composition. A time evolution of the β phase induces a change of the stress probably due to oxygen absorption. Low stress stable ∝ films have been obtained from films involving ∝ and β coexistence by thermal annealing under nitrogen." @default.
- W2040802309 created "2016-06-24" @default.
- W2040802309 creator A5007388916 @default.
- W2040802309 creator A5043788413 @default.
- W2040802309 creator A5050043818 @default.
- W2040802309 creator A5051784308 @default.
- W2040802309 date "1987-12-01" @default.
- W2040802309 modified "2023-09-27" @default.
- W2040802309 title "Optimization of the stresses in tungsten sputtered films, study of their stability" @default.
- W2040802309 cites W1992738869 @default.
- W2040802309 cites W1996256072 @default.
- W2040802309 cites W2015149992 @default.
- W2040802309 cites W2015622748 @default.
- W2040802309 cites W2037171104 @default.
- W2040802309 cites W2066981259 @default.
- W2040802309 cites W2069287425 @default.
- W2040802309 cites W2075162311 @default.
- W2040802309 cites W2095484362 @default.
- W2040802309 doi "https://doi.org/10.1016/0167-9317(87)90046-3" @default.
- W2040802309 hasPublicationYear "1987" @default.
- W2040802309 type Work @default.
- W2040802309 sameAs 2040802309 @default.
- W2040802309 citedByCount "5" @default.
- W2040802309 crossrefType "journal-article" @default.
- W2040802309 hasAuthorship W2040802309A5007388916 @default.
- W2040802309 hasAuthorship W2040802309A5043788413 @default.
- W2040802309 hasAuthorship W2040802309A5050043818 @default.
- W2040802309 hasAuthorship W2040802309A5051784308 @default.
- W2040802309 hasConcept C100460472 @default.
- W2040802309 hasConcept C127413603 @default.
- W2040802309 hasConcept C130472188 @default.
- W2040802309 hasConcept C138885662 @default.
- W2040802309 hasConcept C151730666 @default.
- W2040802309 hasConcept C159985019 @default.
- W2040802309 hasConcept C171250308 @default.
- W2040802309 hasConcept C178790620 @default.
- W2040802309 hasConcept C185592680 @default.
- W2040802309 hasConcept C19067145 @default.
- W2040802309 hasConcept C191897082 @default.
- W2040802309 hasConcept C192562407 @default.
- W2040802309 hasConcept C21036866 @default.
- W2040802309 hasConcept C22423302 @default.
- W2040802309 hasConcept C2777855556 @default.
- W2040802309 hasConcept C2779227376 @default.
- W2040802309 hasConcept C2816523 @default.
- W2040802309 hasConcept C41895202 @default.
- W2040802309 hasConcept C42360764 @default.
- W2040802309 hasConcept C44280652 @default.
- W2040802309 hasConcept C537208039 @default.
- W2040802309 hasConcept C542268612 @default.
- W2040802309 hasConcept C59061564 @default.
- W2040802309 hasConcept C64297162 @default.
- W2040802309 hasConcept C86803240 @default.
- W2040802309 hasConceptScore W2040802309C100460472 @default.
- W2040802309 hasConceptScore W2040802309C127413603 @default.
- W2040802309 hasConceptScore W2040802309C130472188 @default.
- W2040802309 hasConceptScore W2040802309C138885662 @default.
- W2040802309 hasConceptScore W2040802309C151730666 @default.
- W2040802309 hasConceptScore W2040802309C159985019 @default.
- W2040802309 hasConceptScore W2040802309C171250308 @default.
- W2040802309 hasConceptScore W2040802309C178790620 @default.
- W2040802309 hasConceptScore W2040802309C185592680 @default.
- W2040802309 hasConceptScore W2040802309C19067145 @default.
- W2040802309 hasConceptScore W2040802309C191897082 @default.
- W2040802309 hasConceptScore W2040802309C192562407 @default.
- W2040802309 hasConceptScore W2040802309C21036866 @default.
- W2040802309 hasConceptScore W2040802309C22423302 @default.
- W2040802309 hasConceptScore W2040802309C2777855556 @default.
- W2040802309 hasConceptScore W2040802309C2779227376 @default.
- W2040802309 hasConceptScore W2040802309C2816523 @default.
- W2040802309 hasConceptScore W2040802309C41895202 @default.
- W2040802309 hasConceptScore W2040802309C42360764 @default.
- W2040802309 hasConceptScore W2040802309C44280652 @default.
- W2040802309 hasConceptScore W2040802309C537208039 @default.
- W2040802309 hasConceptScore W2040802309C542268612 @default.
- W2040802309 hasConceptScore W2040802309C59061564 @default.
- W2040802309 hasConceptScore W2040802309C64297162 @default.
- W2040802309 hasConceptScore W2040802309C86803240 @default.
- W2040802309 hasLocation W20408023091 @default.
- W2040802309 hasOpenAccess W2040802309 @default.
- W2040802309 hasPrimaryLocation W20408023091 @default.
- W2040802309 hasRelatedWork W103288468 @default.
- W2040802309 hasRelatedWork W1970613751 @default.
- W2040802309 hasRelatedWork W1971287229 @default.
- W2040802309 hasRelatedWork W1988589686 @default.
- W2040802309 hasRelatedWork W2008759912 @default.
- W2040802309 hasRelatedWork W2008985626 @default.
- W2040802309 hasRelatedWork W2009722910 @default.
- W2040802309 hasRelatedWork W2019986523 @default.
- W2040802309 hasRelatedWork W2058607893 @default.
- W2040802309 hasRelatedWork W2058789190 @default.
- W2040802309 hasRelatedWork W2061863391 @default.
- W2040802309 hasRelatedWork W2082853015 @default.
- W2040802309 hasRelatedWork W2090342934 @default.
- W2040802309 hasRelatedWork W2134087226 @default.
- W2040802309 hasRelatedWork W2135565745 @default.
- W2040802309 hasRelatedWork W2140884609 @default.
- W2040802309 hasRelatedWork W2298005701 @default.
- W2040802309 hasRelatedWork W2365821340 @default.
- W2040802309 hasRelatedWork W3008132314 @default.