Matches in SemOpenAlex for { <https://semopenalex.org/work/W2040802728> ?p ?o ?g. }
Showing items 1 to 61 of
61
with 100 items per page.
- W2040802728 abstract "Reduction of defects after development is a critical issue in photolithography. A special category of post development defects is the satellite defect which is located in large exposed areas generally in proximity to large unexposed regions of photoresist. We have investigated the formation of this defect type on ESCAP and ACETAL DUV resists with and without underlying organic BARCs, In this paper, we will present AFM and elemental analysis data to determine the origin of the satellite defect. Imaging was done on a full-field Nikon 248nm stepper and resist processing was completed on a TEL CLEAN TRACK ACT 8 track. Defect inspection and review were performed on a KLA-Tencor and Hitachi SEM respectively. Results indicate that the satellite defect is generated on both BARC and resist films and defect counts are dependent on the dark erosion. Elemental analysis indicates that the defects are composed of sulfur and nitrogen compounds. We suspect that the defect is formed as a result of a reaction between PAG, quencher and TMAH. This defect type is removed after a DIW re-rinse." @default.
- W2040802728 created "2016-06-24" @default.
- W2040802728 creator A5011122605 @default.
- W2040802728 creator A5049873746 @default.
- W2040802728 creator A5058562228 @default.
- W2040802728 date "2001-08-22" @default.
- W2040802728 modified "2023-09-23" @default.
- W2040802728 title "Postdevelopment defect evaluation" @default.
- W2040802728 doi "https://doi.org/10.1117/12.436783" @default.
- W2040802728 hasPublicationYear "2001" @default.
- W2040802728 type Work @default.
- W2040802728 sameAs 2040802728 @default.
- W2040802728 citedByCount "7" @default.
- W2040802728 countsByYear W20408027282013 @default.
- W2040802728 crossrefType "proceedings-article" @default.
- W2040802728 hasAuthorship W2040802728A5011122605 @default.
- W2040802728 hasAuthorship W2040802728A5049873746 @default.
- W2040802728 hasAuthorship W2040802728A5058562228 @default.
- W2040802728 hasConcept C100460472 @default.
- W2040802728 hasConcept C105487726 @default.
- W2040802728 hasConcept C134406635 @default.
- W2040802728 hasConcept C160671074 @default.
- W2040802728 hasConcept C171250308 @default.
- W2040802728 hasConcept C178790620 @default.
- W2040802728 hasConcept C185592680 @default.
- W2040802728 hasConcept C187504802 @default.
- W2040802728 hasConcept C192562407 @default.
- W2040802728 hasConcept C2779227376 @default.
- W2040802728 hasConcept C49040817 @default.
- W2040802728 hasConcept C53524968 @default.
- W2040802728 hasConcept C64885871 @default.
- W2040802728 hasConceptScore W2040802728C100460472 @default.
- W2040802728 hasConceptScore W2040802728C105487726 @default.
- W2040802728 hasConceptScore W2040802728C134406635 @default.
- W2040802728 hasConceptScore W2040802728C160671074 @default.
- W2040802728 hasConceptScore W2040802728C171250308 @default.
- W2040802728 hasConceptScore W2040802728C178790620 @default.
- W2040802728 hasConceptScore W2040802728C185592680 @default.
- W2040802728 hasConceptScore W2040802728C187504802 @default.
- W2040802728 hasConceptScore W2040802728C192562407 @default.
- W2040802728 hasConceptScore W2040802728C2779227376 @default.
- W2040802728 hasConceptScore W2040802728C49040817 @default.
- W2040802728 hasConceptScore W2040802728C53524968 @default.
- W2040802728 hasConceptScore W2040802728C64885871 @default.
- W2040802728 hasLocation W20408027281 @default.
- W2040802728 hasOpenAccess W2040802728 @default.
- W2040802728 hasPrimaryLocation W20408027281 @default.
- W2040802728 hasRelatedWork W1975757250 @default.
- W2040802728 hasRelatedWork W1977612768 @default.
- W2040802728 hasRelatedWork W2004027286 @default.
- W2040802728 hasRelatedWork W2016875512 @default.
- W2040802728 hasRelatedWork W2037718862 @default.
- W2040802728 hasRelatedWork W2040802728 @default.
- W2040802728 hasRelatedWork W2045351436 @default.
- W2040802728 hasRelatedWork W2066149473 @default.
- W2040802728 hasRelatedWork W1966530670 @default.
- W2040802728 hasRelatedWork W2029354917 @default.
- W2040802728 isParatext "false" @default.
- W2040802728 isRetracted "false" @default.
- W2040802728 magId "2040802728" @default.
- W2040802728 workType "article" @default.