Matches in SemOpenAlex for { <https://semopenalex.org/work/W2040808218> ?p ?o ?g. }
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- W2040808218 endingPage "270" @default.
- W2040808218 startingPage "267" @default.
- W2040808218 abstract "Epitaxially stacked structures of Si(100)/ Al2O3(100)/Si(100) were investigated for sensor applications. The Si-on-insulator (SOI) structures were grown on 2-in Si wafers by double heteroepitaxial growth of Al2O3(100) single insulator films and then SI(100) films were grown at about 1000°C with the chemical vapor deposition method. These films had mirror-like surfaces. It was found from ellipsometric measurements that the Al2O3 films cannot be etched by KOH (7 mol/l) at 70°C or dilute HF at 20°C for 60 min. Therefore, the Al2O3 films can be used as an etch-stop layer for micromachining for, e.g., a microdiaphragm. This was demonstrated with membranes which consisted of Al2O3 film (0.1 μm) and Si film (5 μm). The membrane surfaces of Al2O3 films were very flat in comparison with etched Si surfaces." @default.
- W2040808218 created "2016-06-24" @default.
- W2040808218 creator A5000723708 @default.
- W2040808218 creator A5015670326 @default.
- W2040808218 creator A5051829252 @default.
- W2040808218 creator A5054783051 @default.
- W2040808218 creator A5058869309 @default.
- W2040808218 date "1990-02-01" @default.
- W2040808218 modified "2023-10-03" @default.
- W2040808218 title "Epitaxially stacked structures of Si/Al2O3/Si for sensor materials" @default.
- W2040808218 cites W1966551318 @default.
- W2040808218 cites W2042729174 @default.
- W2040808218 cites W2077445137 @default.
- W2040808218 doi "https://doi.org/10.1016/0924-4247(90)85052-6" @default.
- W2040808218 hasPublicationYear "1990" @default.
- W2040808218 type Work @default.
- W2040808218 sameAs 2040808218 @default.
- W2040808218 citedByCount "12" @default.
- W2040808218 crossrefType "journal-article" @default.
- W2040808218 hasAuthorship W2040808218A5000723708 @default.
- W2040808218 hasAuthorship W2040808218A5015670326 @default.
- W2040808218 hasAuthorship W2040808218A5051829252 @default.
- W2040808218 hasAuthorship W2040808218A5054783051 @default.
- W2040808218 hasAuthorship W2040808218A5058869309 @default.
- W2040808218 hasConcept C100460472 @default.
- W2040808218 hasConcept C110738630 @default.
- W2040808218 hasConcept C136525101 @default.
- W2040808218 hasConcept C142724271 @default.
- W2040808218 hasConcept C145667562 @default.
- W2040808218 hasConcept C160671074 @default.
- W2040808218 hasConcept C171250308 @default.
- W2040808218 hasConcept C19067145 @default.
- W2040808218 hasConcept C192562407 @default.
- W2040808218 hasConcept C204787440 @default.
- W2040808218 hasConcept C212702 @default.
- W2040808218 hasConcept C2779227376 @default.
- W2040808218 hasConcept C49040817 @default.
- W2040808218 hasConcept C53143962 @default.
- W2040808218 hasConcept C544956773 @default.
- W2040808218 hasConcept C57410435 @default.
- W2040808218 hasConcept C71924100 @default.
- W2040808218 hasConceptScore W2040808218C100460472 @default.
- W2040808218 hasConceptScore W2040808218C110738630 @default.
- W2040808218 hasConceptScore W2040808218C136525101 @default.
- W2040808218 hasConceptScore W2040808218C142724271 @default.
- W2040808218 hasConceptScore W2040808218C145667562 @default.
- W2040808218 hasConceptScore W2040808218C160671074 @default.
- W2040808218 hasConceptScore W2040808218C171250308 @default.
- W2040808218 hasConceptScore W2040808218C19067145 @default.
- W2040808218 hasConceptScore W2040808218C192562407 @default.
- W2040808218 hasConceptScore W2040808218C204787440 @default.
- W2040808218 hasConceptScore W2040808218C212702 @default.
- W2040808218 hasConceptScore W2040808218C2779227376 @default.
- W2040808218 hasConceptScore W2040808218C49040817 @default.
- W2040808218 hasConceptScore W2040808218C53143962 @default.
- W2040808218 hasConceptScore W2040808218C544956773 @default.
- W2040808218 hasConceptScore W2040808218C57410435 @default.
- W2040808218 hasConceptScore W2040808218C71924100 @default.
- W2040808218 hasIssue "1-3" @default.
- W2040808218 hasLocation W20408082181 @default.
- W2040808218 hasOpenAccess W2040808218 @default.
- W2040808218 hasPrimaryLocation W20408082181 @default.
- W2040808218 hasRelatedWork W139592794 @default.
- W2040808218 hasRelatedWork W1964253164 @default.
- W2040808218 hasRelatedWork W1987851092 @default.
- W2040808218 hasRelatedWork W1998542313 @default.
- W2040808218 hasRelatedWork W2010481829 @default.
- W2040808218 hasRelatedWork W2022627478 @default.
- W2040808218 hasRelatedWork W2040808218 @default.
- W2040808218 hasRelatedWork W2061052759 @default.
- W2040808218 hasRelatedWork W2082031831 @default.
- W2040808218 hasRelatedWork W2162783441 @default.
- W2040808218 hasVolume "21" @default.
- W2040808218 isParatext "false" @default.
- W2040808218 isRetracted "false" @default.
- W2040808218 magId "2040808218" @default.
- W2040808218 workType "article" @default.