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- W2040808539 abstract "노광기의 램프 냉각은 노광성능 및 기기수명에 큰 영향을 미친다. 본 논문에서는 노광장치로 유입되는 냉각공기의 속도를 도출하기 위해 램프하우징 내부의 열유동 해석을 수행하였다. 램프하우징의 냉각성능은 하부와 측면의 냉각 공기 속도에 의해 영향을 받는다. 하부 및 측면의 냉각 공기 속도를 독립변수로 설정하고, 상부 반사경 온도, 타원경의 온도 및 상부 배출공기의 온도를 종속변수로 설정하였다. 효율적인 냉각 해석을 위해 반응표면분석법에 의해 해석 조건을 설정하였다. 설정된 조건에 따라 해석을 수행하였으며, 수행된 결과를 바탕으로 냉각 공기 속도에 따른 램프 하우징 주요부 온도를 예측할 수 있는 회귀식을 도출하였다. 또한 종속변수를 목표온도까지 냉각하기 위한 냉각공기의 유입속도를 설정하였다. The lamp cooling system of the exposure has effect on the exposure efficiency and device lifetime. In this paper, we performed the numerical analysis about the thermal flow in the lamp housing of the exposure apparatus for the cooling air inflow rate. We set up the velocity of cooling air of side and bottom as the independent variables because cooling performance of the lamp housing is affected by the velocity of the cooling air side and bottom. The cooling state of lamp housing depend on three dependent variables; the temperature at top mirror and exhaust gas, ellipsoidal mirror. Response surface methodology was used in order to establish the efficient cooling analysis plan. The regression equation predicting the variables temperature of lamp housing according to the cooling air velocity were drawn. The velocity of cooling air to reach the optimum temperature of the lamp housing were derived." @default.
- W2040808539 created "2016-06-24" @default.
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- W2040808539 date "2014-03-31" @default.
- W2040808539 modified "2023-09-26" @default.
- W2040808539 title "Numerical Analysis for Cooling Condition of a Lamp House in the Exposure Device by Response Surface Methodology" @default.
- W2040808539 cites W1991627706 @default.
- W2040808539 cites W2018737462 @default.
- W2040808539 doi "https://doi.org/10.5762/kais.2014.15.3.1265" @default.
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