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• W2040809987 abstract "We carry out the in situ analysis of chemical species for the growth of carbon nanotubes (CNTs) in direct current plasma enhanced chemical vapor deposition (DC-PECVD) with C2H2–NH3, C3H4–NH3 and CO–NH3 mixtures by optical emission spectroscopy (OES). From OES analysis, it was shown that the hydrogen related radical was regarded as etching species in CNTs growth and the C2 and CH radical as available carbon sources for the growth of CNTs irrespective of carbon source gas. As the NH3 flow rate changed, different chemical species in plasma made effects on the growth of CNTs depending on the source gas." @default.
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• W2040809987 date "2003-03-01" @default.
• W2040809987 modified "2023-10-18" @default.
• W2040809987 title "Effects of source gases on the growth of carbon nanotubes" @default.
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• W2040809987 doi "https://doi.org/10.1016/s0925-9635(02)00290-x" @default.
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